Granted Patent
Utility
US 6,817,822 · App. 10/207,011
Load port, wafer processing apparatus, and method of replacing atmosphere
Inventor:
Kenji Tokunaga
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Jul 30, 2002
Inventor
Kenji Tokunaga
Assignee (at issue)
Semiconductor Leading Edge Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.