Granted Patent
Utility
US 6,818,064 · App. 09/990,991
Photoresist dispense arrangement by compensation for substrate reflectivity
Inventor:
Daniel C. Baker
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Nov 16, 2001
Inventor
Daniel C. Baker
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.