Granted Patent
Utility
US 6,819,698 · App. 09/512,417
Energy monitor for F2 molecular fluorine laser and method of energy stabilization
Inventor:
Klaus Vogler
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Feb 24, 2000
Inventor
Klaus Vogler
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.