Granted Patent
Utility
US 6,819,699 · App. 09/518,639
Arf excimer laser device, scanning type exposure device and ultraviolet laser device
Inventors:
Tatsuo Enami, Osamu Wakabayashi, Katsutomo Terashima, Kiwamu Takehisa, Tsukasa HORI, Hakaru Mizoguchi
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Mar 3, 2000
Inventors
Tatsuo Enami
Osamu Wakabayashi
Katsutomo Terashima
Kiwamu Takehisa
Tsukasa HORI
Hakaru Mizoguchi
Assignee (at issue)
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.