Granted Patent
Utility
US 6,819,820 · App. 09/932,433
Use of applied force to improve MEMS switch performance
Inventors:
Murali Chaparala, Michael Julian Daneman
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Aug 18, 2001
Inventors
Murali Chaparala
Michael Julian Daneman
Assignee (at issue)
Analog Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.