Granted Patent
Utility
US 6,822,728 · App. 10/667,387
Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system
Inventors:
Andrew W. McCullough, Gregg M. Gallatin
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Sep 23, 2003
Inventors
Andrew W. McCullough
Gregg M. Gallatin
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.