Granted Patent
Utility
US 6,822,977 · App. 10/165,767
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
Inventors:
Uwe Stamm, Hans-Stephan Albrecht, Gunter Nowinski
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Jun 6, 2002
Inventors
Uwe Stamm
Hans-Stephan Albrecht
Gunter Nowinski
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.