Granted Patent
Utility
US 6,825,051 · App. 10/150,989
Plasma etch resistant coating and process
Inventors:
Fred AmRhein, Christophe Pomarede
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: May 17, 2002
Inventors
Fred AmRhein
Christophe Pomarede
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.