Granted Patent
Utility
US 6,827,824 · App. 08/631,465
Enhanced collimated deposition
Inventors:
Guy T. Blalock, Gurtej S. Sandhu
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Apr 12, 1996
Inventors
Guy T. Blalock
Gurtej S. Sandhu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.