Granted Patent
Utility
US 6,828,247 · App. 10/214,754
Method for etching organic film, method for fabricating semiconductor device and pattern formation method
Inventors:
Hideo Nakagawa, Toshio Hayashi, Yasuhiro Morikawa
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Aug 9, 2002
Inventors
Hideo Nakagawa
Toshio Hayashi
Yasuhiro Morikawa
Assignees (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
ULVAC, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.