IP Library › Granted Patent US 6,829,814
Granted Patent Utility
US 6,829,814 · App. 10/231,325

Process of making an all-silicon microphone

Inventors: John E. Freeman, William J. Baney, Timothy M. Betzner, Dan W. Chilcott, John C. Christenson, Timothy A. Vas, George M Queen, Stephen Long
Patented Case View Patent ↗
Granted: Dec 14, 2004 Filed: Aug 29, 2002
Inventors
John E. Freeman
William J. Baney
Timothy M. Betzner
Dan W. Chilcott
John C. Christenson
Timothy A. Vas
George M Queen
Stephen Long
Assignee (at issue)
Delphi Technologies

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Quick Facts
Patent No.
US 6,829,814
App. No.
10/231,325
Filed
2002-08-29
Granted
2004-12-14
Kind
B1