Granted Patent
Utility
US 6,830,057 · App. 10/286,317
Wafer container cleaning system
Inventors:
Kert Dolechek, Jeffry Davis
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Nov 1, 2002
Inventors
Kert Dolechek
Jeffry Davis
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.