Granted Patent
Utility
US 6,830,854 · App. 10/685,751
System and method for correcting 3D effects in an alternating phase-shifting mask
Inventors:
Yong Liu, Hua-Yu Liu
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Oct 14, 2003
Inventors
Yong Liu
Hua-Yu Liu
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.