Granted Patent
Utility
US 6,830,971 · App. 10/286,627
High K artificial lattices for capacitor applications to use in CU or AL BEOL
Inventors:
Subramanian Balakumar, Chew Hoe Ang, Jia Zhen Zheng, Paul Proctor
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Nov 2, 2002
Inventors
Subramanian Balakumar
Chew Hoe Ang
Jia Zhen Zheng
Paul Proctor
Assignee (at issue)
Chartered Semiconductor Manufacturing LTD
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.