IP Library Granted Patent US 6,834,066
Granted Patent Utility
US 6,834,066 · App. 09/838,715

Stabilization technique for high repetition rate gas discharge lasers

Inventors: Igor Bragin, Vadim Berger, Juergen Kleinschmidt
Patented Case View Patent ↗
Granted: Dec 21, 2004 Filed: Apr 18, 2001
Inventors
Igor Bragin
Vadim Berger
Juergen Kleinschmidt
Assignee (at issue)
Lambda Physik AG

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Quick Facts
Patent No.
US 6,834,066
App. No.
09/838,715
Filed
2001-04-18
Granted
2004-12-21
Kind
B2