IP Library Granted Patent US 6,834,069
Granted Patent Utility
US 6,834,069 · App. 10/162,115

Molecular fluorine laser with intracavity polarization enhancer

Inventors: Elko Bergmann, Frank Voss, Klaus Vogler
Patented Case View Patent ↗
Granted: Dec 21, 2004 Filed: Jun 3, 2002
Inventors
Elko Bergmann
Frank Voss
Klaus Vogler
Assignee (at issue)
Lambda Physik AG

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Quick Facts
Patent No.
US 6,834,069
App. No.
10/162,115
Filed
2002-06-03
Granted
2004-12-21
Kind
B1