Granted Patent
Utility
US 6,835,289 · App. 10/375,072
Particle implantation apparatus and particle implantation method
Inventor:
Takatoshi Yamashita
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Feb 28, 2003
Inventor
Takatoshi Yamashita
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.