IP Library › Granted Patent US 6,835,510
Granted Patent Utility
US 6,835,510 · App. 10/662,365

Hybrid phase-shift mask

Inventors: Jang Fung Chen, Roger Caldwell, Thomas Laidig, Kurt E. Wampler
Patented Case View Patent ↗
Granted: Dec 28, 2004 Filed: Sep 16, 2003
Inventors
Jang Fung Chen
Roger Caldwell
Thomas Laidig
Kurt E. Wampler
Assignee (at issue)
ASML Masktools B.V.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,835,510
App. No.
10/662,365
Filed
2003-09-16
Granted
2004-12-28
Kind
B2