Yttria-alumina composite oxide films, laminated bodies having the same, a method for producing the same, and corrosion resistant members and films
An object of the invention is to provide an yttria-alumina composite oxide film wherein peeling-off of the film from a substrate may be prevented. An intermediary layer is provided on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component. In the intermediary layer, a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9. An yttria-alumina composite oxide film is formed on the intermediary layer. A ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than the garnet phase is 2.5 or more in the yttria-alumina composite oxide film based on an X-ray diffraction measurement.
1. A laminated body comprising a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component; an yttria-alumina composite oxide film; and an intermediary layer interposed between said substrate and said yttria-alumina composite oxide film:
wherein a ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than said garnet phase is 2.5 or more in said yttria-alumina composite oxide film based on an X-ray diffraction measurement; and a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9 in said intermediary layer.
2. The laminated body of claim 1 , wherein said ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is 0.6 or less in said intermediary layer.
3. The laminated body of claim 1 , wherein said intermediary layer has a thickness of 1 μm or more and 50 μm or less.
4. The laminated body of claim 1 , wherein said yttria-alumina composite oxide film has a thickness of 50 μm or more.
5. The laminated body of claim 1 , wherein said substrate contains a spinel compound, or a zirconium compound, or both of said spinel and zirconium compounds in a total amount of 10% by weight or less.
6. The laminated body of claim 1 , wherein said yttria-alumina composite oxide film is formed by spraying a powder mixture of yttria powder and alumina powder to obtain a spray deposit and by heat-treating said spray deposit.
7. A corrosion-resistant member comprising said laminated body of claim 1 .
8. A corrosion-resistant member of claim 7 , wherein said corrosion-resistant member is to be exposed to a halogen gas or plasma of said halogen gas.
9. An yttria-alumina composite oxide film formed on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component:
wherein an intermediary layer is interposed between said substrate and said yttria-alumina composite oxide film, and a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9 in said intermediary layer; and a ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than said garnet phase is 2.5 or more in said yttria-alumina composite oxide film based on an X-ray diffraction measurement.
10. The film of claim 9 , wherein said ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is 0.6 or less in said intermediary layer.
11. The film of claim 9 , wherein said yttria-alumina composite oxide film has a thickness of 50 μm or more.
12. The film of claim 9 , wherein said substrate contains a spinel compound, or a zirconium compound, or both of said spinel type and zirconium compounds in a total amount of 10% by weight or less.
13. The film of claim 9 , wherein said yttria-alumina composite oxide film is formed by spraying a powder mixture of yttria powder and alumina powder to obtain a spray deposit and by heat-treating said spray deposit.
14. A method of fabricating an yttria-alumina composite oxide film on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component:
wherein an intermediary layer is formed on said substrate, a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9 in said intermediary layer, and said yttria-alumina composite oxide film is formed by heat-treating a spray deposit on said intermediary layer, and a ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than said garnet phase is 2.5 or more in said yttria-alumina composite oxide film based on an X-ray diffraction measurement.
15. The method of claim 14 , wherein said ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is 0.6 or less in said intermediary layer.
16. The method of claim 14 , wherein said intermediary layer has a thickness of 1 μm or more and 50 μm or less.
17. The method of claim 14 , wherein said yttria-alumina composite oxide film has a thickness of 50 μm or more.
18. The method of claim 14 , wherein said substrate contains a spinel compound, or a zirconium compound, or both of said spinel type and zirconium compounds in a total amount of 10% by weight or less.
19. The method of claim 14 , wherein said spray deposit is formed by spraying a powder mixture of yttria powder and alumina powder on the intermediary layer.
20. An yttria-alumina composite oxide film being formed according to the method of claim 14 .
21. A corrosion-resistant film being composed of said yttria-alumina composite oxide film of claim 20 .