Supporting structure for a ceramic susceptor
A supporting structure for attaching a ceramic susceptor into a processing chamber is provided. The ceramic susceptor is used for placing and heating an article to be processed. The supporting structure has one or more supporting projections integrally provided on a back face of the ceramic susceptor and one or more supporting members mounted to the processing chamber and separated from the supporting projections. At least a part of the supporting member is made from a heat-insulating material and the supporting projection is attached to the supporting member by mechanical means.
1. A supporting structure for attaching a ceramic susceptor in a processing chamber, said ceramic susceptor having a setting face for placing an article to be processed and being subjected to temperature changes, said supporting structure comprising:
a supporting projection integrally provided on a surface of said susceptor opposed to said setting face of said susceptor;
a heat-insulating member surrounding at least a portion of said supporting projection and being separated from said supporting projection; and
a metallic member connected to said heat-insulating member and being attached to said processing chamber,
wherein said supporting projection is attached to said heat-insulating member by mechanical means, and said metallic member and said supporting projection are not directly attached to one another, and a central axis of said heat-insulating member is substantially linearly aligned with a central axis of said metallic member.
2. The supporting structure according to claim 1 , wherein said heat-insulating member and said metallic member each have a tubular shape.
3. The supporting structure according to claim 2 , wherein each of said supporting projection and said heat-insulating member has a through-hole and said mechanical means is an engaging member inserted into the through-holes of said supporting projection and said heat-insulating member.
4. The supporting structure according to claim 2 , wherein said mechanical means is a holding member for holding an outer surface of each of said supporting projection and said heat-insulating member from outside thereof.
5. The supporting structure according to claim 2 , wherein said mechanical means is a pressing member for pressing said heat-insulating member against said supporting projection to fix said supporting projection to said heat-insulating member.
6. The supporting structure according to claim 1 , wherein each of said supporting projection and said heat-insulating member have through-holes that are aligned with one another, and said mechanical means is an engaging member inserted into the aligned through-holes of said supporting projection and said heat-insulating member.
7. The supporting structure according to claim 1 , wherein said mechanical means is a holding member for holding an outer surface of each of said supporting projection and said heat-insulating member from outside thereof.
8. The supporting structure according to claim 1 , wherein said mechanical means is a pressing member for pressing said heat-insulating member against said supporting projection to fix said supporting projection to said heat-insulating member.