Apparatus and method of cleaning a substrate
View Patent ↗A cleaning apparatus is provided with a processing bath to be filled with a cleaning chemical, an ultrasonic oscillator, and a retainer for holding a substrate to be immersed into a cleaning chemical. The front surface of the substrate is cleaned while ultrasonic waves are radiated from the ultrasonic oscillator onto the back surface of the substrate.
1. A substrate cleaning apparatus comprising:
a processing bath to be filled with a cleaning chemical;
an ultrasonic oscillator disposed in the processing bath and immersed in the cleaning chemical; and
a retainer for retaining a substrate to be immersed in the cleaning chemical such that ultrasonic waves originating from the ultrasonic oscillator are radiated onto a back surface of the substrate; and
propagation control apparatus for scattering or damping ultrasonic waves originating from the ultrasonic oscillator,
wherein the ultrasonic oscillator has a plurality of oscillation sources disposed in a uniformly dispersed manner.
2. A substrate cleaning apparatus comprising:
a processing bath to be filled with a cleaning chemical;
an ultrasonic oscillator disposed in the processing bath and immersed in the cleaning chemical;
a retainer for retaining a substrate to be immersed in the cleaning chemical such that ultrasonic waves originating from the ultrasonic oscillator are radiated onto a back surface of the substrate; and
a rotary mechanism for rotating the substrate retained by the retainer.
3. A substrate cleaning apparatus comprising:
a processing bath to be filled with a cleaning chemical;
an ultrasonic oscillator disposed in the processing bath and immersed in the cleaning chemical;
a retainer for retaining a substrate to be immersed in the cleaning chemical such that ultrasonic waves originating from the ultrasonic oscillator are radiated onto a back surface of the substrate;
propagation control apparatus for scattering or damping ultrasonic waves originating from the ultrasonic oscillator; and
a rotary mechanism for rotating the substrate retained by the retainer.
4. The substrate cleaning apparatus according to claim 3 , wherein the propagation control means includes jet nozzles for squirting a chemical in the propagation path of ultrasonic waves, thus circulating a flow of chemical.
5. A substrate cleaning apparatus comprising:
a processing bath to be filled with a cleaning chemical;
an ultrasonic oscillator disposed in the processing bath and immersed in the cleaning chemical;
a retainer for retaining a substrate to be immersed in the cleaning chemical such that ultrasonic waves originating from the ultrasonic oscillator are radiated onto a back surface of the substrate; and
a propagation control apparatus for scattering or damping ultrasonic waves originating from the ultrasonic oscillator, wherein the propagation control apparatus is constituted by means of placing, in a propagation path of ultrasonic waves, a plate-like member having a plurality of openings selectively formed therein.