Hardness improvement of silicon carboxy films
A method for depositing a low dielectric constant film having an improved hardness and elastic modulus is provided. In one aspect, the method comprises depositing a low dielectric constant film having silicon, carbon, and hydrogen, and then treating the deposited film with a plasma of helium, hydrogen, or a mixture thereof at conditions sufficient to increase the hardness of the film.
1. A method for depositing a low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 and having an improved hardness, comprising:
depositing a low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 and comprising silicon, carbon, and oxygen, wherein depositing the low dielectric constant film comprises reacting a mixture comprising an organosilicon compound in the presence of a plasma formed by RF power; and then
treating the deposited film with a plasma of a mixture of helium and hydrogen at conditions sufficient to increase the hardness of the film.
2. The method of claim 1 , wherein the organosilicon compound is an aliphatic organosilicon compound.
3. The method of claim 2 , wherein the mixture further comprises a cyclic organosilicon compound comprising at least one silicon-carbon bond.
4. The method of claim 2 , wherein the aliphatic organosilicon compound comprises a silicon-hydrogen bond.
5. The method of claim 2 , wherein the mixture further comprises an aliphatic hydrocarbon compound comprising an unsaturated carbon-carbon bond.
6. The method of claim 3 , wherein the cyclic organosilicon compound is selected from the group consisting of 3,5-trisilano-2,4,6-trimethylene, 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS), octamethylcyclotetrasiloxane (OMCTS), 1,3,5,7,9,-pentamethylcyclopentasiloxane, 1,3,5,7-tetrasilano-2,6-dioxy-4,8-dimethylene, and hexamethylcyclotrisiloxane.
7. The method of claim 2 , wherein the aliphatic organosilicon compound is selected from the group consisting of methylsilane, dimethylsilane, trimethylsilane, dimethyldimethoxysilane, ethylsilane, disilanomethane, bis(methylsilano)methane, 1,2-disilanoethane, 2,2-bis(methylsilano)ethane, 1,2-disilanopropane, 1,3-dimethyldisiloxane, 1,1,3,3-tetramethyldisiloxane (TMDSO), hexamethyldisiloxane (HMDS), 1,3-bis(silanomethylene)disiloxane, bis(1-methyldisiloxanyl)methane, 2,2-bis(1-methyldisiloxanyl)propane, diethylsilane, propylsilane, vinylmethylsilane, 1,1,2,2-tetramethyldisilane, hexamethyldisilane, 1,1,2,2,3,3-hexamethyltrisilane, 1,1,2,3,3-pentamethyltrisilane, dimethyldisilanoethane, dimethyldisilanopropane, tetramethyldisilanoethane, and tetramethyldisilanopropane.
8. The method of claim 3 , wherein the cyclic organosilicon compound is 3,5-trisilano-2,4,6-trimethylene, 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS), octamethylcyclotetrasiloxane (OMCTS), or a mixture thereof.
9. The method of claim 5 , wherein the aliphatic organosilicon compound is trimethylsilane, and the aliphatic hydrocarbon compound is ethylene.
10. The method of claim 1 , wherein the RF power comprises a power density ranging from about 0.03 W/cm 2 to about 3.2 W/cm 2 at a frequency of about 13.56 MHz.
11. The method of claim 1 , wherein the conditions comprise a substrate temperature of about 100° C. to about 400° C.
12. The method of claim 1 , wherein the conditions comprise a pressure of about 4 Torr to about 10 Torr.
13. A method for depositing a low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 and having an improved hardness, comprising:
reacting a gas mixture comprising:
one or more cyclic organosilicon compounds;
one or more aliphatic compounds; and
one or more oxidizing gases in the presence of a plasma formed by RF power;
depositing the low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 on a surface of the substrate; and
treating the deposited film with a plasma of helium, hydrogen, or a mixture thereof at conditions sufficient to increase the hardness of the film.
14. The method of claim 13 , wherein treating the deposited film comprises flowing hydrogen gas at a rate of about 200 to about 10,000 sccm across a surface of the film for about 30 seconds.
15. The method of claim 13 , wherein the one or more aliphatic compounds comprises ethylene, methylsilane, dimethylsilane, trimethylsilane, or a mixture thereof.
16. A method for depositing a low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 and having an improved hardness, comprising:
reacting a gas mixture comprising:
about 5 percent by volume to about 80 percent by volume of one or more cyclic organosilicon compounds;
about 5 percent by volume to about 15 percent by volume of one or more aliphatic compounds; and
about 5 percent by volume to about 20 percent by volume of one or more oxidizing gases in the presence of a plasma formed by RF power;
depositing the low dielectric constant film having a dielectric constant less than 4.0 or about 4.0 on a surface of the substrate; and
treating the deposited film with a plasma of helium, hydrogen, or a mixture thereof at conditions sufficient to increase the hardness of the film.
17. The method of claim 16 , wherein treating the deposited film comprises flowing hydrogen gas at a rate of about 500 sccm across a surface of the film for about 30 seconds.
18. The method of claim 16 , wherein the one or more aliphatic compounds comprises ethylene, methylsilane, dimethylsilane, trimethylsilane, or a mixture thereof.
19. A method for depositing a dielectric film, comprising:
depositing a dielectric film having a dielectric constant less than 4.0 or about 4.0 and comprising silicon, carbon, and oxygen, wherein depositing the dielectric film comprises reacting a mixture comprising one or more cyclic organosilicon compounds, one or more aliphatic hydrocarbon compounds, and one or more oxidizing gases in the presence of a plasma formed by RF power; and then
treating the deposited film with a plasma of helium, hydrogen, or a mixture thereof at conditions sufficient to increase the hardness of the film.
20. The method of claim 19 , wherein the one or more aliphatic hydrocarbon compounds is selected from the group consisting of ethylene, propylene, acetylene, butadiene, t-butylethylene, and 1,1,3,3-tetramethylbutylbenzene.
21. The method of claim 19 , wherein the mixture further comprises one or more aliphatic organosilicon compounds.
22. The method of claim 21 , wherein the one or more cyclic organosilicon compounds is octamethylcyclotetrasiloxane, the one or more aliphatic hydrocarbon compounds is ethylene, the one or more aliphatic organosilicon compounds is trimethylsilane, and the one or more oxidizing gases is oxygen.