Contactor having conductive particles in a hole as a contact electrode
A contactor is provided which contactor comprises an insulating substrate, a concave portion formed in the insulating substrate and extending in a perpendicular direction from a surface thereof, and elastic conductive particles disposed in the concave portion. A part of one of the conductive particles protrudes from the surface of the insulating substrate.
1. A contactor comprising:
an insulating substrate;
a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
a conductive liquid filling said concave portion; and
a conductive particle disposed in said concave portion and having a specific gravity different from a specific gravity of said conductive liquid,
wherein a difference between said specific gravity of said conductive particle and said specific gravity of said conductive liquid causes a part of said conductive particle to protrude from a surface of said insulating substrate.
2. The contactor as claimed in claim 1 , wherein said specific gravity of said conductive particle is smaller than said specific gravity of said conductive liquid so that a buoyancy acting on said conductive particle causes the conductive particle to protrude from said insulating substrate.
3. The contactor as claimed in claim 1 , wherein said specific gravity of said conductive particle is higher than said specific gravity of said conductive liquid so that a gravity force acting on said conductive particle causes the conductive particle to protrude from said insulating substrate.
4. The contactor as claimed in claim 1 , wherein said concave portion is formed as a through hole penetrating through said insulating substrate in said perpendicular direction, and a terminal for circuit wiring closes one end of said through hole.
5. The contactor as claimed in claim 1 , wherein a liquid storing portion is formed on a surface end of said concave portion, the liquid storing portion having a diameter larger than a diameter of a bottom of said concave portion, and when said conductive particle is pressed into said conductive liquid, said conductive liquid flows into said liquid storing portion so that said conductive liquid does not spill from said concave portion.
6. The contactor as claimed in claim 1 , wherein an insulating film is formed on the surface of said insulating substrate; an opening is formed at a position in said insulating film corresponding to one end of said concave portion, the opening having a diameter smaller than a diameter of said conductive particle; and a part of said conductive particle protrudes from said opening.