Liquid droplet ejection apparatus, method of manufacturing electro-optic device, electro-optic device, and electronic apparatus

1. A liquid droplet ejection apparatus having:

a function liquid droplet ejection head which is mounted on a movable table and which ejects a function liquid droplet toward a workpiece in a manner synchronized with scanning by said movable table; and function liquid supply means for supplying said function liquid droplet ejection head with a function liquid,

wherein said function liquid supply means comprises:

a function liquid tank for supplying a function liquid;

a connection tube of resin make for connecting said function liquid droplet ejection head and said function liquid tank together;

a flexible rack member fixed at one end thereof to said movable table and at an opposite end thereof to an apparatus frame so as to support thereon said connection tube in a manner movable to follow the scanning of said function liquid droplet ejection head; and

a grounding means disposed over an entire length of said flexible rack member, for static elimination of said connection tube through said apparatus frame by keeping contact with said connection tube.

2. The apparatus according to claim 1 , wherein said grounding means is constituted by a static elimination sheet disposed on that supporting surface of said flexible rack member which supports said connection tube.

3. The apparatus according to claim 2 , wherein said static elimination sheet is disposed over an entire length of the supporting surface of said flexible rack member.

4. The apparatus according to claim 2 , wherein said static elimination sheet comprises a nap for static elimination provided on that surface of said static elimination sheet which comes into contact with said connection tube.

5. The apparatus according to claim 1 , further comprising an electrically conductive coupling for grounding said connection tube through said apparatus frame, said coupling being interposed in a non-moving portion except for that part of the connection tube which is supported on said flexible rack member.

6. The apparatus according to claim 5 , wherein said coupling is disposed in a plurality of numbers in the non-moving portion of the connecting tube at a predetermined interval.

7. The liquid droplet ejection apparatus according to claim 5 , wherein grounding of said coupling is made through said apparatus frame by means of an electrically conductive coupling supporting fixture.

8. A method of manufacturing an electro-optic device comprising forming a film forming part with a function liquid droplet ejected from the function liquid droplet ejection head toward the workpiece by using the liquid droplet ejection apparatus as set forth in claim 5 .

9. An electro-optic device manufactured by the method of manufacturing an electro-optic device as set forth in claim 8 .

10. An electro-optic device comprising a film forming part formed by a function liquid droplet ejected from the function liquid droplet ejection head toward the workpiece by using the liquid droplet ejection apparatus as set forth in claim 5 .

11. An electronic apparatus having mounted thereon the electro-optic device as set forth in claim 10 .

12. A liquid droplet ejection apparatus having: a function liquid droplet ejection head; a wiping unit for wiping away a nozzle surface of said function liquid droplet ejection head by moving relative to said function liquid droplet ejection head; a movable table for mounting thereon said wiping unit so as to move said wiping unit relative to said function liquid droplet ejection head; and cleaning liquid supply means for supplying said wiping unit with a cleaning liquid for wiping,

wherein said cleaning liquid supply means comprises:

a cleaning liquid tank for feeding a cleaning liquid;

a connection tube of resin make for connecting said cleaning liquid tank and said wiping unit together;

a flexible rack member fixed at one end thereof to said movable table and at an opposite end thereof to an apparatus frame so as to support thereon said connection tube in a manner movable to follow the movement of said wiping unit; and

a grounding means disposed over an entire length of said flexible rack member, for static elimination of said connection tube through said apparatus frame by keeping contact with said connection tube.

13. The apparatus according to claim 12 , wherein said grounding means is constituted by a static elimination sheet disposed on that supporting surface of said flexible rack member which supports said connection tube.

14. The apparatus according to claim 13 , wherein said static elimination sheet is disposed over an entire length of the supporting surface of said flexible rack member.

15. The apparatus according to claim 13 , wherein said static elimination sheet comprises a nap for static elimination provided on that surface of said static elimination sheet which comes into contact with said connection tube.

16. The apparatus according to claim 12 , further comprising an electrically conductive coupling for grounding said connection tube through said apparatus frame, said coupling being interposed in a non-moving portion except for that part of the connection tube which is supported on said flexible rack member.

17. The apparatus according to claim 16 , wherein said coupling is disposed in a plurality of numbers in the non-moving portion of the connecting tube at a predetermined interval.

18. The liquid droplet ejection apparatus according to claim 16 , wherein grounding of said coupling is made through said apparatus frame by means of an electrically conductive coupling supporting fixture.

19. A method of manufacturing an electro-optic device comprising forming a film forming part with a function liquid droplet ejected from the function liquid droplet ejection head toward the workpiece by using the liquid droplet ejection apparatus as set forth in claim 16 .

20. An electro-optic device manufactured by the method of manufacturing an electro-optic device as set forth in claim 19 .

21. An electro-optic device comprising a film forming part formed by a function liquid droplet ejected from the function liquid droplet ejection head toward the workpiece by using the liquid droplet ejection apparatus as set forth in claim 16 .

22. An electronic apparatus having mounted thereon the electro-optic device as set forth in claim 21 .