Device and method for protecting against oxidation of a conductive layer in said device
View Patent ↗In a semiconductor device including a first conductive layer, the first conductive layer is treated with a nitrogen/hydrogen plasma before an additional layer is deposited thereover. The treatment stuffs the surface with nitrogen, thereby preventing oxygen from being adsorbed onto the surface of the first conductive layer. In one embodiment, a second conductive layer is deposited onto the first conductive layer, and the plasma treatment lessens if not eliminates an oxide formed between the two layers as a result of subsequent thermal treatments. In another embodiment, a dielectric layer is deposited onto the first conductive layer, and the plasma treatment lessens if not eliminates the ability of the first conductive layer to incorporate oxygen from the dielectric.
1. An in-process device, comprising:
a substrate;
a conductive layer over said substrate and having a surface stuffed with a non-oxygen material; and
a second conductive layer formed on the conductive layer and a third conductive layer formed on the second conductive layer, wherein the conductive layer comprises a metal layer, the second conductive layer comprises a tungsten nitride layer, and the third conductive layer comprises copper.
2. The in-process device of claim 1 , wherein said surface is a nitrogen-stuffed surface.
3. The in-process device of claim 1 wherein the conductive layer has been exposed to a material selected from the group consisting of methylsilane, hexamethyldisilane and hexamethyldisilazane.
4. The in-process device of claim 1 wherein the substrate comprises a silicon substrate.
5. An in-process device, comprising:
a substrate;
a passivated conductive layer over the substrate, the passivated conductive layer having a reduced ability to associate with oxygen by being exposed to a material selected from the group consisting of phosphine and methylsilane; and
a second conductive layer formed on the conductive layer and a third conductive layer formed on the second conductive layer, wherein the conductive layer comprises a metal layer, the second conductive layer comprises a tungsten nitride layer, and the third conductive layer comprises copper.
6. The in-process device of claim 5 wherein the conductive layer comprises tungsten nitride.
7. The in-process device of claim 6 further comprising another conductive layer formed on the tungsten nitride layer.
8. The in-process device of claim 7 wherein the another conductive layer comprises copper.
9. The in-process device of claim 5 wherein the substrate comprises a silicon substrate.
10. An in-process device, comprising:
a substrate; and
a passivated conductive layer over the substrate, the passivated conductive layer having a reduced ability to associate with oxygen by being exposed to methylsilane.
11. The in-process device of claim 10 wherein the conductive layer comprises tungsten nitride.
12. The in-process device of claim 11 further comprising another conductive layer formed on the tungsten nitride layer.
13. The in-process device of claim 12 wherein the another conductive layer comprises copper.
14. The in-process device of claim 10 further comprising a second conductive layer formed on the conductive layer and a third conductive layer formed on the second conductive layer.
15. The in-process device of claim 14 wherein the conductive layer comprises a metal layer, the second conductive layer comprises a tungsten nitride layer, and the third conductive layer comprises copper.
16. The in-process device of claim 10 wherein the substrate comprises a silicon substrate.