Method for fabricating a metal-insulator-metal capacitor in a semiconductor device
View Patent ↗A method of fabricating a metal-insulator-metal capacitor in a semiconductor device is disclosed. An example method for fabricating an MIM capacitor of a semiconductor device deposits a metal layer to be used as a lower electrode of an MIM capacitor, deposits a sacrificial layer on the metal layer, and removes some part of the sacrificial layer to form the MIM capacitor thereon. In addition, the example method deposits a dielectric layer and an upper metal layer and forms the MIM capacitor by patterning the dielectric layer and the upper metal layer.
1. An MIM capacitor of a semiconductor device comprising:
a substrate;
a lower metal layer in contact with the substrate;
a sacrificial layer in contact with the substrate and patterned to reveal an area of the lower metal layer;
dielectric layer in contact with the lower metal layer, the substrate surface, and the sacrificial layer wherein the thickness of the sacrificial layer and the dielectric layer is substantially uniform; and
upper metal layer in contact with the dielectric layer.
2. The MIM capacitor as defined in claim 1 , further comprising:
an interlayer dielectric in contact with the upper metal layer;
a via hole through the interlayer dielectric in contact with the dielectric layer;
a barrier metal layer disposed in the via hole;
a plug metal in contact with the barrier layer; and
an uppermost metal layer disposed over the via hole.
3. The MIM capacitor as defined by claim 2 , wherein the metal is selected from the group of tungsten, copper family metals, and platinum family metals.
4. The MIM capacitor as defined by claim 2 , wherein the barrier metal layer is made of a high fusion point metal or nitride thereof, and wherein the barrier metal layer is configured to have one of a single layer structure or a multi-layer structure.
5. The MIM capacitor as defined by claim 1 , wherein
the sacrificial layer is used as an etch stopping layer.
6. The MIM capacitor as defined by claim 1 , wherein the sacrificial layer is silicon oxide or silicon nitride.
7. The MIM capacitor as defined by claim 1 , wherein the sacrificial layer has a thickness of 100˜200Å.
8. The MIM capacitor as defined by claim 1 , wherein the dielectric layer is made of a material selected from the group of SiN, SiO 2 , Al 2 O 3 , TaON, TiO 2 , Ta 2 O 5 , ZrO 5 , (Ba,Sr)TiO 3 , (Pb,Zr)TiO 3 , and (Pb,La)(Zr,Ti)O 3 , and wherein the dielectric layer is configured to have one of a single layer structure or a multi-layer structure.
9. The MIM capacitor as defined by claim 1 , wherein the dielectric layer has a thickness of 200˜1000Å.
10. The MIM capacitor as defined by claim 1 , wherein the upper and the lower metal layers of the MIM capacitor are made of at least one of aluminum and a transition element.