Thin film semiconductor element and method of manufacturing the same
The invention provides a thin film semiconductor element and a method of manufacturing the same to achieve lowering the resistance of gate electrodes, lowering the capacitance of source electrodes, and enhancing etching characteristics. The thin film semiconductor element can include a semiconductor film provided on a substrate, source and drain electrodes connected to the semiconductor film, and a gate electrode provided on the semiconductor film with an insulating film interposed therebetween. The film thickness of the source and drain electrodes can be smaller than the film thickness of the gate electrode.
1. A thin film semiconductor element, comprising:
a semiconductor film provided above a substrate;
source and drain electrodes coupled to the semiconductor film; and
a gate electrode arranged on the semiconductor film with an insulating film interposed therebetween,
the gate electrode having a first metal provided at a bottom of the gate electrode, a first Al-based metal provided above the first metal, and a first refractory metal with a higher melting point than that of the first Al-based metal provided above the Al-based metal,
the source and drain electrodes having a second metal provided at a bottom of each the source and drain electrodes, a second Al-based metal provided above the second metal, and a second refractory metal with a higher melting point than that of the second Al-based metal provided above the second Al-based metal, and
a film thickness of the second Al-based metal being about half of the first Al-based metal.
2. A thin film semiconductor element, comprising:
a semiconductor film provided above a substrate;
source and drain electrodes coupled to the semiconductor film; and
a gate electrode arranged on the semiconductor film with an insulating film interposed therebetween,
the gate electrode having a first metal provided at a bottom of the gate electrode, a first Al-based metal provided above the first metal, and a first refractory metal with a higher melting point than that of the first Al-based metal provided above the Al-based metal,
the source and drain electrodes having a second metal provided at a bottom of each the source and drain electrodes, a second Al-based metal provided above the second metal, and a second refractory metal with a higher melting point than that of the second Al-based metal provided above the second Al-based metal, and
a film thickness of the second metal being larger than a film thickness of the second refractory metal.
3. The thin film semiconductor element according to claim 2 ,
the first metal and being a refractory metal with a higher melting point than the first Al-based metal.
4. The thin film semiconductor element according to claim 2 ,
the second metal being a refractory metal with a higher melting point than the second Al-based metal.
5. The thin film semiconductor element according to claim 2 ,
the refractory metal including any one of Ti, W, Ta, Mo, and Cr.
6. The thin film semiconductor element according to claim 2 ,
the refractory metal being any one of a high purity metal, a metal nitride, and a metal oxide.
7. The thin film semiconductor element according to claim 2 ,
the refractory material being composed of a laminated structure of plural kinds of metals.