IP Library Granted Patent US 7,170,969
Granted Patent B1
US 7,170,969 · App. 10/704,381 · Granted Jan 30, 2007

X-ray microscope capillary condenser system

Assignee: Xradia, Inc.
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Quick Facts
Patent No.
US 7,170,969
App. No.
10/704,381
Granted
Jan 30, 2007
Kind
B1
Abstract

A radiation condenser system for an X-ray microscope allows for the efficient collection and relay of radiation from a source to the sample. It generates a converging hollow cone of radiation that can be used in the imaging of a sample or target using a zone plate lens. This system comprises a capillary tube for receiving and focusing radiation onto a sample. A center stop is provided for blocking radiation being transmitted along an axis of the capillary tube.

Claims (24)

1. A zone plate microscope, comprising:

an electron bombardment source for generating x-ray radiation;

a single capillary tube, having an elliptical curvature, for receiving and focusing radiation onto a sample;

a zone plate lens for collecting the radiation from the sample, wherein a numerical aperture of the capillary tube is matched to the zone plate lens;

a center stop for blocking radiation being transmitted along an axis of the capillary tube;

a pin hole aperture; and

a stop support for attaching the center stop to the capillary tube to support the center stop along the axis of the capillary tube.

2. A zone plate microscope as claimed in claim 1 , wherein an inner surface of the capillary tube is coated with a reflective material.

3. A zone plate microscope as claimed in claim 1 , wherein the center stop is attached to a radiation exit end of the capillary tube by the stop support.

4. A zone plate microscope as claimed in claim 1 , further comprising a phase plate, wherein the capillary tube has a pupil aperture that illuminates only part of an aperture of the zone plate lens.

5. A zone plate microscope as claimed in claim 1 , wherein the capillary tube has an annular shaped pupil such that a pupil of the zone plate lens is smaller or equal to an inner part of the annular shaped pupil.

6. A zone plate microscope as claimed in claim 1 , wherein the capillary tube has an imaging conjugate of unity to minimize image aberration.

7. A zone plate microscope as claimed in claim 1 , wherein the capillary tube has a magnifying geometry to achieve suitable illumination of the sample.

8. A zone plate microscope as claimed in claim 1 , wherein the stop support comprises a membrane for supporting the center stop along the axis of the capillary tube.

9. A zone plate microscope as claimed in claim 8 , wherein the membrane is bonded to an end of the capillary tube.

10. A zone plate microscope, comprising:

an electron bombardment source for generating radiation;

a single capillary tube for receiving and focusing the radiation onto a sample;

a detector;

a zone plate lens for collecting the radiation from the sample and focusing the radiation on the detector;

a center stop for blocking radiation being transmitted along an axis of the capillary tube;

a pin hole stop for blocking radiation between the capillary tube and the detector;

a membrane for supporting the center stop along the axis of the capillary tube;

wherein a numerical aperture of the capillary tube is matched to the zone plate lens and the capillary tube has an annular shaped pupil such that a pupil of the zone plate lens is smaller or equal to an inner part of the annular shaped pupil.

Assignments (2)
MERGER Recorded Jan 10, 2014
From: XRADIA, INC.
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 031938/0108 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 9, 2004
From: YUN, WENBING; DUEWER, FREDERICK WILLIAM; WANG, YUXIN
To: XRADIA, INC.
Reel/Frame 014490/0334 →