Load-lock technique
A load-lock system which includes a chamber housing and a capacity changing system for continuously changing the capacity of the chamber housing.
1. A load-lock system, comprising:
a chamber housing; and
a capacity changing system for continuously changing the capacity of said chamber housing.
2. A load-lock system according to claim 1 , wherein said capacity changing system includes a driving unit configured and positioned to move a predetermined portion of said chamber housing.
3. A load-lock system according to claim 2 , wherein said predetermined portion of said chamber housing includes a table for supporting an object.
4. A load-lock system according to claim 2 , further comprising a seal member configured and positioned to seal between said predetermined portion of said chamber housing and another portion of said chamber housing.
5. A load-lock system according to claim 1 , further comprising a seal member configured and positioned to seal between a predetermined portion of said chamber housing and another portion of said chamber housing.
6. A load-lock system according to claim 1 , further comprising a tubular member provided to reduce a pressure inside said chamber housing.
7. A load-lock system according to claim 6 , further comprising a valve through which said tubular member is connected to a main chamber in which an object is to be processed.
8. A load-lock system according to claim 6 , further comprising a valve and an exhaust pump, wherein said tubular member is connected to said exhaust pump through said valve.
9. A device manufacturing apparatus comprising:
a load-lock system as recited in claim 1 .
10. An exposure apparatus for exposing an object to a pattern radiation, said apparatus comprising:
a load-lock system as recited in claim 1 .
11. A device manufacturing method, comprising the steps of:
exposing an object to pattern radiation by use of an exposure apparatus as recited in claim 10 ; and
developing the exposed object.
12. A load-lock method, comprising the steps of:
conveying an object into a chamber housing;
continuously reducing the capacity of the chamber housing after said conveying step; and
reducing the pressure inside the chamber housing after said capacity reducing step.
13. A method according to claim 12 , wherein in said capacity reducing step, a predetermined portion of the chamber housing is moved.
14. A method according to claim 13 , wherein the predetermined portion of the chamber housing includes a table for supporting the object.
15. A method according to claim 13 , wherein an interface between the predetermined portion of the chamber housing and another portion of the chamber housing is sealed.
16. A method according to claim 13 , wherein, in said pressure reducing step, the pressure is reduced by use of a tubular member.
17. A method according to claim 16 , wherein for the pressure reduction, the tubular member is connected to a main chamber in which the object is to be processed.
18. A method according to claim 16 , wherein for the pressure reduction, the tubular member is connected to an exhaust pump.