Light emitting device comprising film having hygroscopic property and transparency and manufacturing method thereof
View Patent ↗A light emitting element having an organic compound, which can be extended its longevity is provided. According to the present invention, there is provided a constitution in which, in order to protect a light emitting element from moisture, an inorganic insulating film 312 a , a stress relaxation layer 312 b having transparency and a hygroscopic property, and an inorganic insulating film 312 c are repeatedly laminated over a cathode. The stress relaxation layer 312 b having transparency and the hygroscopic property uses at least one film selected from the group consisting of a film comprising a same material as that of a layer 310 , containing an organic compound, sandwiched between a cathode and an anode, a layer capable of being formed by vapor deposition, and a layer capable of being formed by coating.
1. A light emitting device comprising:
a light emitting element over a substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency; and
wherein the film having the hygroscopic property and transparency comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
2. The light emitting device according to claim 1 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
3. The light emitting device according to claim 1 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
4. The light emitting device according to claim 1 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
5. The light emitting device according to claim 1 , wherein the film having the hygroscopic property and transparency is a polymeric material film containing an organic compound, obtained by coating.
6. The light emitting device according to claim 1 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
7. A light emitting device comprising:
a first substrate;
a light emitting element over the first substrate;
a second substrate over the light emitting element,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein a luminescence from the light emitting element is allowed to pass through the second substrate, thereby being recognized by a user; and
wherein the film having the hygroscopic property and transparency comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
8. The light emitting device according to claim 7 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
9. The light emitting device according to claim 7 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
10. The light emitting device according to claim 7 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
11. The light emitting device according to claim 7 , wherein the light emitting element and a TFT connected to the light emitting element are provided over the first substrate.
12. The light emitting device according to claim 7 , wherein the film having the hygroscopic property and transparency is a polymeric material film containing an organic compound, obtained by coating.
13. The light emitting device according to claim 7 , is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
14. A light emitting device comprising:
a light emitting element sandwiched between a first substrate and a second substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having a hygroscopic property and transparency is provided adjacent to the first substrate or the second substrate; and
wherein the film having the hygroscopic property and transparency comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
15. The light emitting device according to claim 14 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
16. The light emitting device according to claim 14 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
17. A light emitting device comprising:
a light emitting element sandwiched between a first substrate and a second substrate,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein a silicon nitride film formed by RF sputtering using silicon as a target is provided adjacent to the first substrate or the second substrate; and
wherein the silicon nitride film has an etching speed of 9 nm/mm or less, a hydrogen concentration of 1×10 21 atoms/cm 3 or less, and an oxygen concentration in the range of from 5×10 18 atoms/cm 3 to 5×10 21 atoms/cm 3 .
18. The light emitting device according to claim 17 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
19. The light emitting device according to claim 17 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
20. A method for manufacturing a light emitting device comprising a light emitting element comprising a cathode, a layer containing an organic compound, and an anode, the method comprising the steps of:
forming a TFT over a substrate;
forming an anode connected to the TFT over the substrate;
forming a layer containing an organic compound over the anode;
forming a cathode over the layer containing the organic compound;
forming a first inorganic insulating film over the cathode;
forming a film having a hygroscopic property and transparency over the first inorganic insulating film; and
forming a second inorganic insulating film over the film having the hygroscopic property and transparency,
wherein the film having the hygroscopic property and transparency comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
21. The method for manufacturing the light emitting device according to claim 20 , wherein at least one film of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
22. A light emitting device comprising:
a light emitting element over a substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of α-NPD (4,4′-bis[N-(naphthyl)-N-phenyl-amino]biphenyl), BCP (bathocuproin), MTDATA (4,4′,4″-tris(N-3-methylphenyl-N-phenyl-amino)triphenylamine), and Alq 3 (a tris-8-quinolinolate aluminum complex).
23. The light emitting device according to claim 22 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
24. The light emitting device according to claim 22 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
25. The light emitting device according to claim 22 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
26. The light emitting device according to claim 22 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
27. A light emitting device comprising:
a first substrate;
a light emitting element over the first substrate;
a second substrate over the light emitting element,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein a luminescence from the light emitting element is allowed to pass through the second substrate, thereby being recognized by a user; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of α-NPD (4,4′-bis[N-(naphthyl)-N-phenyl-amino]biphenyl), BCP (bathocuproin), MTDATA (4,4′,4″-tris(N-3-methylphenyl-N-phenyl-amino)triphenylamine), and Alq 3 (a tris-8-quinolinolate aluminum complex).
28. The light emitting device according to claim 27 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
29. The light emitting device according to claim 27 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
30. The light emitting device according to claim 27 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
31. The light emitting device according to claim 27 , wherein the light emitting element and a TFT connected to the light emitting element are provided over the first substrate.
32. The light emitting device according to claim 27 , is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
33. A light emitting device comprising:
a light emitting element sandwiched between a first substrate and a second substrate,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having a hygroscopic property and transparency is provided adjacent to the first substrate or the second substrate; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of α-NPD (4,4′-bis[N-(naphthyl)-N-phenyl-amino]biphenyl), BCP (bathocuproin), MTDATA (4,4′,4″-tris(N-3-methylphenyl-N-phenyl-amino)triphenylamine), and Alq 3 (a tris-8-quinolinolate aluminum complex).
34. The light emitting device according to claim 33 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
35. The light emitting device according to claim 33 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
36. A method for manufacturing a light emitting device comprising a light emitting element comprising a cathode, a layer containing an organic compound, and an anode, the method comprising the steps of:
forming a TFT over a substrate;
forming an anode connected to the TFT over the substrate;
forming a layer containing an organic compound over the anode;
forming a cathode over the layer containing the organic compound;
forming a first inorganic insulating film over the cathode;
forming a film having a hygroscopic property and transparency over the first inorganic insulating film; and
forming a second inorganic insulating film over the film having the hygroscopic property and transparency,
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of α-NPD (4,4′-bis[N-(naphthyl)-N-phenyl-amino]biphenyl), BCP (bathocuproin), MTDATA (4,4′,4″-tris(N-3-methylphenyl-N-phenyl-amino)triphenylamine), and Alq 3 (a tris-8-quinolinolate aluminum complex).
37. The method for manufacturing the light emitting device according to claim 36 , wherein at least one film of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
38. A light emitting device comprising:
a light emitting element over a substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of MgO, SrO 2 , and SrO.
39. The light emitting device according to claim 38 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
40. The light emitting device according to claim 38 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
41. The light emitting device according to claim 38 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
42. The light emitting device according to claim 38 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
43. A light emitting device comprising:
a first substrate;
a light emitting element over the first substrate;
a second substrate over the light emitting element,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein a luminescence from the light emitting element is allowed to pass through the second substrate, thereby being recognized by a user; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of MgO, SrO 2 , and SrO.
44. The light emitting device according to claim 43 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
45. The light emitting device according to claim 43 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
46. The light emitting device according to claim 43 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
47. The light emitting device according to claim 43 , wherein the light emitting element and a TFT connected to the light emitting element are provided over the first substrate.
48. The light emitting device according to claim 43 , is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
49. A light emitting device comprising:
a light emitting element sandwiched between a first substrate and a second substrate,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having a hygroscopic property and transparency is provided adjacent to the first substrate or the second substrate; and
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of MgO, SrO 2 , and SrO.
50. The light emitting device according to claim 49 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
51. The light emitting device according to claim 49 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
52. A method for manufacturing a light emitting device comprising a light emitting element comprising a cathode, a layer containing an organic compound, and an anode, the method comprising the steps of:
forming a TFT over a substrate;
forming an anode connected to the TFT over the substrate;
forming a layer containing an organic compound over the anode;
forming a cathode over the layer containing the organic compound;
forming a first inorganic insulating film over the cathode;
forming a film having a hygroscopic property and transparency over the first inorganic insulating film; and
forming a second inorganic insulating film over the film having the hygroscopic property and transparency,
wherein the film having the hygroscopic property and transparency comprises a material selected from the group consisting of MgO, SrO 2 , and SrO.
53. The method for manufacturing the light emitting device according to claim 52 , wherein at least one film of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
54. A light emitting device comprising:
a light emitting element over a substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises a silicon nitride film; and
wherein the silicon nitride film has an etching speed of 9 nm/mm or less, a hydrogen concentration of 1×10 21 atoms/cm 3 or less, and an oxygen concentration in the range of from 5×10 18 atoms/cm 3 to 5×10 21 atoms/cm 3 .
55. The light emitting device according to claim 54 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
56. The light emitting device according to claim 54 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
57. A light emitting device comprising:
a first substrate;
a light emitting element over the first substrate;
a second substrate over the light emitting element,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein the light emitting element is covered by a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein a luminescence from the light emitting element is allowed to pass through the second substrate, thereby being recognized by a user;
wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises a silicon nitride film; and
wherein the silicon nitride film has an etching speed of 9 nm/mm or less, a hydrogen concentration of 1×10 21 atoms/cm 3 or less, and an oxygen concentration in the range of from 5×10 18 atoms/cm 3 to 5×10 21 atoms/cm 3 .
58. The light emitting device according to claim 57 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
59. The light emitting device according to claim 57 , wherein the light emitting element and a TFT connected to the light emitting element are provided over the first substrate.
60. The light emitting device according to claim 57 , is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
61. A light emitting device comprising:
a light emitting element sandwiched between a first substrate and a second substrate,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein a laminate comprising a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having a hygroscopic property and transparency is provided adjacent to the first substrate or the second substrate;
wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises a silicon nitride film; and
wherein the silicon nitride film has an etching speed of 9 nm/mm or less, a hydrogen concentration of 1×10 21 atoms/cm 3 or less, and an oxygen concentration in the range of from 5×10 18 atoms/cm 3 to 5×10 21 atoms/cm 3 .
62. The light emitting device according to claim 61 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
63. The light emitting device according to claim 61 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
64. A method for manufacturing a light emitting device comprising a light emitting element comprising a cathode, a layer containing an organic compound, and an anode, the method comprising the steps of:
forming a TFT over a substrate;
forming an anode connected to the TFT over the substrate;
forming a layer containing an organic compound over the anode;
forming a cathode over the layer containing the organic compound;
forming a first inorganic insulating film over the cathode;
forming a film having a hygroscopic property and transparency over the first inorganic insulating film; and
forming a second inorganic insulating film over the film having the hygroscopic property and transparency,
wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises a silicon nitride film; and
wherein the silicon nitride film has an etching speed of 9 nm/mm or less, a hydrogen concentration of 1×10 21 atoms/cm 3 or less, and an oxygen concentration in the range of from 5×10 18 atoms/cm 3 to 5×10 21 atoms/cm 3 .
65. A light emitting device comprising:
a light emitting element over a first substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
a first laminate which covers the light emitting element;
a sealing material over the first laminate;
a second laminate over the sealing material; and
a second substrate over the second laminate,
wherein each of the first laminate and the second laminate comprises a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency; and
wherein the film having the hygroscopic property and transparency of the first laminate comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
66. The light emitting device according to claim 65 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
67. The light emitting device according to claim 65 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
68. The light emitting device according to claim 65 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
69. The light emitting device according to claim 65 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
70. A light emitting device comprising:
a first substrate;
a light emitting element over the first substrate;
a first laminate which covers the light emitting element;
a sealing material over the first laminate;
a second laminate over the sealing material; and
a second substrate over the sealing laminate,
the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
wherein each of the first laminate and the second laminate comprises a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having the hygroscopic property and transparency;
wherein a luminescence from the light emitting element is allowed to pass through the second substrate, thereby being recognized by a user; and
wherein the film having the hygroscopic property and transparency of the first laminate comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
71. The light emitting device according to claim 70 , wherein the film having the hygroscopic property and transparency has a smaller stress than that of at least one of the first inorganic insulating film and the second inorganic insulating film.
72. The light emitting device according to claim 70 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film comprises at least one film selected from the group consisting of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, a diamond-like carbon film, a carbon nitride film, and a laminate thereof.
73. The light emitting device according to claim 70 , wherein at least one of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.
74. The light emitting device according to claim 70 , wherein the light emitting element and a TFT connected to the light emitting element are provided over the first substrate.
75. The light emitting device according to claim 70 , is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
76. A light emitting device comprising:
a light emitting element over a first substrate, the light emitting element comprising:
a cathode;
a layer containing an organic compound; and
an anode,
a first laminate which covers the light emitting element;
a sealing material over the first laminate;
a second laminate over the sealing material; and
a second substrate over the second laminate,
wherein each of the first laminate and the second laminate comprises a first inorganic insulating film, a film having a hygroscopic property and transparency over the first inorganic insulating film, and a second inorganic insulating film over the film having a hygroscopic property and transparency, and is provided adjacent to the first substrate or the second substrate; and
wherein the film having the hygroscopic property and transparency of the first laminate comprises a same material as that of at least one layer of a plurality of layers which constitute the layer containing the organic compound sandwiched between the cathode and the anode.
77. The light emitting device according to claim 76 , wherein at least one of the first substrate and the second substrate is a plastic substrate.
78. The light emitting device according to claim 76 is at least one member selected from a group consisting of a video camera, a digital camera, a display, a car navigation system, a personal computer, and a portable information terminal.
79. A method for manufacturing a light emitting device comprising a light emitting element comprising a cathode, a layer containing an organic compound, and an anode, the method comprising the steps of:
forming a TFT over a substrate;
forming an anode connected to the TFT over the substrate;
forming a layer containing an organic compound over the anode;
forming a cathode over the layer containing the organic compound;
forming a first inorganic insulating film over the cathode;
forming a film having a hygroscopic property and transparency over the first inorganic insulating film;
forming a second inorganic insulating film over the film having the hygroscopic property and transparency,
wherein the film having the hygroscopic property and transparency is formed by vapor deposition utilizing resistance heating.
80. The method for manufacturing the light emitting device according to claim 79 , wherein at least one film of the first inorganic insulating film and the second inorganic insulating film is a silicon nitride film formed by RF sputtering using silicon as a target.