IP Library Granted Patent US 7,232,484
Granted Patent B2
US 7,232,484 · App. 10/997,160 · Granted Jun 19, 2007

Method and apparatus for doping semiconductors

Assignee: Evergreen Solar Inc.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,232,484
App. No.
10/997,160
Granted
Jun 19, 2007
Kind
B2
Abstract

Semiconductor materials such as silicon particles are doped by mixing the semiconductor material with a solution having a dopan and a solvent. The solvent is removed from the wetted surface of the particles of the semiconductor material, thereby yielding particles that are substantially free from the solvent and are uniformly coated with the dopant.

Claims (31)

1. A method for doping a semiconductor material, the method comprising:

mixing particles of a semiconductor material with a doping solution comprising a dopant and a solvent to form a mixture; and

heating the mixture to vaporize the solvent, thereby yielding particles of the semiconductor material which are substantially free from solvent and uniformly coated with the dopant.

2. The method of claim 1 wherein the mixture is heated to a temperature of between about 30° C. to about 110° C.

3. The method of claim 1 wherein the particles of the semiconductor material are silicon particles.

4. The method of claim 3 wherein the silicon particles are in the form of pellets.

5. The method of claim 3 wherein the silicon particles are in the form of angular irregularly shaped particles having sizes up to 1 cm in diameter.

6. The method of claim 3 wherein the silicon particles are in the form of spherical particles.

7. The method of claim 1 wherein the dopant is one or more of a p-type dopant.

8. The method of claim 1 wherein the dopant is one or more of a Group III element.

9. The method of claim 1 wherein the dopant is one or more of a n-type dopant.

10. The method of claim 1 wherein the dopant is one or more of a Group V element.

11. The method of claim 1 wherein the solvent has a boiling temperature between about 40° C. and about 110° C.

12. A method for doping a semiconductor material for use in adding a dopant to a semiconductor melt, the method comprising the steps of:

a. applying a doping solution comprising the dopant and a solvent to particles of the semiconductor material to yield a feedstock material coated with the doping solution;

b. mixing the feedstock material to uniformly coat the particles of the semiconductor material with the doping solution; and

c. drying the coated feedstock material to evaporate the solvent, thereby leaving a coat of dopant on the surface of the feedstock material.

13. The method of claim 12 further comprising the step of:

d. melting the dried coated feedstock material to form a mixture of semiconductor material and the dopant.

14. The method of claim 13 wherein the mixture comprises a concentration of dopant sufficient to provide the desired doping level; 0.01 to 20 ohm-cm n-type or p-type material.

15. The method of claim 13 further comprising the step of:

e. feeding the melted mixture into a crucible to grow a crystal ribbon.

16. The method of claim 12 wherein step c comprises applying heat to the coated feedstock material.

17. The method of claim 12 wherein step c comprises applying a vacuum to the coated feedstock material.

18. The method of claim 12 wherein step c comprises blow-drying the feedstock material.

19. The method of claim 12 wherein the particles of the semiconductor material are silicon particles.

20. The method of claim 12 wherein the dopant is one or more of a p-type dopant.

21. The method of claim 12 wherein the dopant is one or more of a Group III element.

22. The method of claim 12 wherein the dopant is one or more of a n-type dopant.

23. The method of claim 12 wherein the dopant is one or more of a Group V element.

24. The method of claim 12 wherein the solvent is a low boiling point alcohol.

Assignments (2)
SECURITY AGREEMENT Recorded May 3, 2010
From: EVERGREEN SOLAR, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 024320/0458 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 5, 2005
From: CRETELLA, MARY C.; WALLACE, RICHARD L.,JR.
To: EVERGREEN SOLAR INC.
Reel/Frame 015533/0968 →
Continuity (3)
Continuation 1021539100 · Aug 8, 2002
Provisional Application 6031178200 · Aug 10, 2001
Related Publication 20050112855A1 · May 26, 2005