Alignment apparatus and method for aligning stacked devices
View Patent ↗An apparatus for passively aligning first and second substrates having micro-components disposed thereon when the substrates do not include patterned surfaces which face each other. The apparatus includes a first depression which cooperates with an alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the first substrate and a second depression which cooperates with a second alignment sphere to mechanically engage a corresponding depression disposed on the front surface of the second substrate. The first and second depression of the alignment apparatus and the alignment spheres cooperate to passively align micro-components disposed on each of the substrates.
1. An apparatus for aligning a first substrate relative to a second substrate wherein the first substrate includes a front surface, a rear surface and at least one micro-component disposed on the front surface and the second substrate includes a front surface, a rear surface and at least one micro-component disposed on the front surface and wherein the front surfaces of the first and second substrates are oriented in the same direction, the apparatus comprising:
a pyramidally-shaped alignment member having a pair of side surfaces and an apex mechanically receivable within a recess disposed in said front surface of the first substrate;
said apex configured to partially project through the rear surface of said first substrate to mechanically engage a recess disposed on the front surface of the second substrate; and
said side surfaces and said apex cooperating to passively align the micro-components disposed on each of said substrates.
2. An assembly for aligning first and second substrates each having at least one micro-component disposed thereon, each of said substrates including a front surface which faces a first direction and opposing side surfaces which face one or more second directions, said assembly comprising:
a first retaining member having a side interface which mechanically engages a corresponding side interface disposed on a first side surface of the first substrate and a bottom depression which cooperates with an alignment element to mechanically engage a corresponding depression disposed on the front surface of the second substrate;
a second retaining member having a side interface which mechanically engages a corresponding side interface disposed on a second side surface of the first substrate and a bottom depression which cooperates with a second alignment element to mechanically engage a corresponding depression disposed on the front surface of the second substrate,
said first and second retaining members cooperating to passively align corresponding micro-components disposed on each of the substrates.
3. An assembly according to claim 2 wherein said side interfaces of the first and second retaining members include angles which mechanically compliment the angles disposed on said first and second side surfaces of the first substrate, each of said angles cooperating to passively align micro-components disposed on each of the substrates.