Bulk acoustic resonator with matched resonance frequency and fabrication process
View Patent ↗The resonator comprises a piezoelectric layer arranged between two electrodes. An electrical heating resistor is arranged in thermal contact with at least one of the electrodes. Temporary heating of the electrode enables the material constituting the electrode to be partially evaporated, so as to thin the electrode and thus adjust the resonance frequency. Measurement of the resonance frequency in the course of evaporation enables the heating to be interrupted when the required resonance frequency is obtained. One of the electrodes can be arranged on a substrate formed by an acoustic Bragg grating. The resonator can comprise a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.
1. Bulk acoustic resonator having at least one resonance frequency, comprising a piezoelectric layer arranged between two electrodes, the resonator comprising heating means arranged in thermal contact with at least one of the electrodes and enabling the material constituting the electrode to be partially evaporated by temporary heating of the electrode, wherein the heating means comprise at least one electrical resistor; and
an electrically insulating layer on an external face of at least one of the electrodes, the electrical resistor being arranged on the external face of the electrically insulating layer.
2. Resonator according to claim 1 , wherein the external face of one of the electrodes is arranged on a substrate formed by an acoustic Bragg grating, the heating means being in thermal contact with the other electrode.
3. Resonator according to claim 1 , comprising a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.
4. Bulk acoustic resonator having at least one resonance frequency, comprising a piezoelectric layer arranged between two electrodes, resonator comprising heating means arranged in thermal contact with at least one of the electrodes and enabling the material constituting the electrode to be partially evaporated by temporary heating of the electrode,
wherein the heating means comprise at least one electrical resistor; and
wherein the electrical resistor is integrated in the electrode.
5. Resonator according to claim 4 , wherein the external face of one of the electrodes is arranged on a substrate formed by an acoustic Bragg grating, the heating means being in thermal contact with the other electrode.
6. Resonator according to claim 4 , comprising a substrate comprising a cavity whereon one of the electrodes is at least partially arranged.