IP Library › Granted Patent US 7,316,240
Granted Patent B2
US 7,316,240 · App. 11/110,779 · Granted Jan 8, 2008

Exhaust system and mini-exhaust static pressure controlling apparatus thereof

Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,316,240
App. No.
11/110,779
Granted
Jan 8, 2008
Kind
B2
Abstract

An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.

Claims (20)

1. A mini-exhaust static pressure controlling apparatus for controlling a process area, comprising:

an exhaust chamber comprising an exterior wall and an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust; and

an auto release damping device disposed on the exterior wall to control static pressure of the air exhaust in the exhaust chamber, the auto release damping device comprising a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device between the exterior wall and the diaphragm;

wherein the adjusting device applies a stress on the diaphragm to maintain the arc shape of the diaphragm.

2. The mini-exhaust static pressure controlling apparatus as claimed in claim 1 , wherein the adjusting device comprises a screwing device.

3. The mini-exhaust static pressure controlling apparatus as claimed in claim 1 , wherein the static pressure of the air exhaust in the exhaust chamber is under room pressure.

4. An exhaust system in a foundry, comprising:

a process area comprising a tool disposed therein, an exhaust inlet, and an exhaust outlet; and

a mini-exhaust static pressure controlling apparatus disposed at the exhaust outlet, wherein the mini-exhaust static pressure controlling apparatus comprising:

an exhaust chamber comprising an exterior wall and an air inlet connected to the process area receiving air exhaust from die process area, and an air outlet venting the air exhaust; and

an auto release damping device disposed on the exterior wall to control static pressure of the air exhaust in the exhaust chamber, the auto release damping device comprising a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device between the exterior wall and the diaphragm;

wherein the adjusting device applies a stress on the diaphragm to maintain the arc shape of the diaphragm.

5. The exhaust system as claimed in claim 4 , wherein the adjusting device comprises a screwing device.

6. The exhaust system as claimed in claim 4 , wherein the static pressure of the air exhaust in the exhaust chamber is under room pressure.

7. A method of static pressure controlling for a process area, comprising:

providing an exhaust chamber on an exhaust outlet of the process area, receiving air exhaust from the process area;

providing an auto release damping device on an exterior wall of the exhaust chamber, the auto release damping device comprising a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device between the exterior wall and the diaphragm, wherein the adjusting device applies a stress on the diaphragm to maintain the arc shape of the diaphragm; and

controlling static pressure of the air exhaust in the exhaust chamber by adjusting the adjusting device.

8. The method as claimed in claim 7 , wherein the adjusting device comprises a screwing device.

9. The method as claimed in claim 7 , wherein the static pressure of the air exhaust in the exhaust chamber is under room pressure. modifications and similar arrangements.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 21, 2005
From: KUO, PO-SUNG; CHEN, YUNG-DAR; KUO, DAR-RUNG; WEN, MING CHIEN; WANG, MING-TSONG
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 016495/0369 →
Continuity (1)
Related Publication 20060237073A1 · Oct 26, 2006