Semiconductor image sensor module, method for manufacturing the same as well as camera and method for manufacturing the same
A semiconductor image sensor module and a method for manufacturing thereof as well as a camera and a method for manufacturing thereof are provided in which a semiconductor image sensor chip and an image signal processing chip are connected with a minimum parasitic resistance and parasitic capacity and efficient heat dissipation of the image signal processing chip and shielding of light are simultaneously obtained. A semiconductor image sensor module 1 at least includes a semiconductor image sensor chip 2 having a transistor forming region on a first main surface of a semiconductor substrate and having a photoelectric conversion region with a light incident surface formed on a second main surface on the side opposite to the first main surface and an image signal processing chip 3 for processing image signals formed in the semiconductor image sensor chip 2 , wherein a plurality of bump electrodes 15 a are formed on a first main surface, a plurality of bump electrodes 15 b are formed on the image signal processing chip 3 , both the chips 2 and 3 are formed to be laminated through heat dissipating means 4 and the plurality of bump electrodes 15 a of the semiconductor image sensor chip 2 and the plurality of bump electrodes 15 b on the image signal processing chip 3 are electrically connected.
1. A semiconductor image sensor module comprising at least:
a semiconductor image sensor chip having a transistor forming region formed at a first main surface of a semiconductor substrate and having a photoelectric conversion region with a light incident surface formed at a second main surface opposite to the first main surface side and
an image signal processing chip in which image signals formed in said semiconductor image sensor chip are processed,
wherein a plurality of bump electrodes are formed over the first main surface of said semiconductor image sensor chip,
a plurality of bump electrodes are formed over said image signal processing chip,
said semiconductor image sensor chip and image signal processing chip are secured together with a heat dissipating means therebetween, and
wherein said heat dissipating means is comprised of conductive material,
said heat dissipating means has openings, in which conductive electrodes surrounded with insulative material are formed, at positions corresponding to said plurality of bump electrodes and
individual ones of the plurality of bump electrodes of said semiconductor image sensor chip and individual ones of the plurality of bump electrodes on said image signal processing chip are electrically connected through the conductive electrodes.
2. A semiconductor image sensor module comprising at least:
a semiconductor image sensor chip having a transistor forming region formed at a first main surface of a semiconductor substrate and having a photoelectric conversion region with a light incident surface formed at a second main surface opposite to the first main surface side and
an image signal processing chip in which image signals formed in said semiconductor image sensor chip are processed,
wherein a plurality of bump electrodes are formed over the first main surface of said semiconductor image sensor chip,
a plurality of bump electrodes are formed over said image signal processing chip,
said semiconductor image sensor chip and image signal processing chip are secured together with a heat dissipating means therebetween, and
wherein said heat dissipating means is comprised of a two-layer structure of heat insulative material and heat conductive material,
said heat dissipating means has openings, in which conductive electrodes are formed, at positions corresponding to said plurality of bump electrodes and
the heat insulative material side of said heat dissipating means is adjacent said semiconductor image sensor chip and said heat conductive material side is with adjacent said image signal processing chip to electrically connect the plurality of bump electrodes of said semiconductor image sensor chip and the plurality of bump electrodes on said image signal processing chip through the conductive electrodes.
3. A camera comprising:
a semiconductor image sensor module including at least a semiconductor image sensor chip that has a transistor region at a first main surface and a photoelectric conversion region with a light incident surface at a second main surface opposite to the first main surface and an image signal processing chip for processing image signals formed in said semiconductor image sensor chip;
a plurality of bump electrodes are formed at the first main surface of said semiconductor image sensor chip,
a plurality of bump electrodes are formed over a side of said image signal processing chip,
said semiconductor image sensor chip and image signal processing chip are secured together with a heat dissipating means therebetween, and
a lens provided at said second main surface side of said semiconductor image sensor module,
wherein said heat dissipating means is formed of conductive material,
said heat dissipating means has openings, in which conductive electrodes surrounded with insulative material are formed, at positions corresponding to said plurality of bump electrodes and
individual ones of the plurality of bump electrodes of said semiconductor image sensor chip and individual ones of the plurality of bump electrodes on said image signal processing chip are electrically connected through the conductive electrodes.
4. A camera comprising:
a semiconductor image sensor module including at least a semiconductor image sensor chip that has a transistor region at a first main surface and a photoelectric conversion region with a light incident surface at a second main surface opposite to the first main surface and an image signal processing chip for processing image signals formed in said semiconductor image sensor chip;
a plurality of bump electrodes are formed at the first main surface of said semiconductor image sensor chip,
a plurality of bump electrodes are formed over a side of said image signal processing chip,
said semiconductor image sensor chip and image signal processing chip are secured together with a heat dissipating means therebetween, and
a lens provided at said second main surface side of said semiconductor image sensor module,
wherein said heat dissipating means is comprised of a two-layer structure of heat insulative material and heat conductive material,
said heat dissipating means has openings, in which conductive electrodes are formed, at positions corresponding to said plurality of bump electrodes and
the heat insulative material side of said heat dissipating means is at a side corresponding to said semiconductor image sensor chip and said heat conductive material side is at a side corresponding to said image signal processing chip.