Temperature control method and apparatus
In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.
1. A temperature control method for obtaining detected temperatures; said temperature control method comprising:
detecting temperature of a processing means for processing a target object at a plurality of detection positions;
controlling temperature of said processing means such that each of said detected temperatures matches corresponding one of a plurality of target temperatures;
a first step of preliminarily measuring temperature of said target object at a plurality of measurement positions as said target temperatures are varied and determining degrees of interference at said measurement positions; and
a second step of obtaining correction values for correcting at least either of said target temperatures and said detected temperatures of said processing means based on said determined degrees of interference;
wherein said first step includes the step of obtaining an interference matrix that relates changes in said target temperatures with changes in temperatures at said measurement positions of said target object and wherein said second step includes the step of obtaining said correction values by using the inverse matrix of said interference matrix.
2. The temperature control method of claim 1 wherein said second step includes the step of obtaining said correction values such that fluctuations of temperatures at said measurement positions are reduced.
3. A temperature control method for obtaining detected temperatures; said temperature control method comprising:
detecting temperature of a processing means for processing a target object at a plurality of detection positions;
controlling temperature of said processing means such that each of said detected temperatures matches corresponding one of a plurality of target temperatures;
a first step of preliminarily measuring temperature of said target object at a plurality of measurement positions as said target temperatures are varied and determining degrees of interference at said measurement positions;
a second step of obtaining correction values for correcting at least either of said target temperatures and said detected temperatures of said processing means based on said determined degrees of interference; and
a third step of correcting at least either of said target temperatures and said detected temperatures by using said obtained correction values;
wherein said first step includes the step of determining said degree of interference as of when a specified time has elapsed since said target temperatures are varied.
4. The temperature control method of claim 3 wherein said third step includes the step of correcting at least either of said target temperatures and said detected temperatures over a period from when said processing means starts processing said target object until when said specified time has elapsed thereafter.
5. In a temperature adjustor adapted to detect temperatures of a processing means for processing a target object at a plurality of detection positions and to control said temperatures of said processing means such that each of said detected temperatures will match corresponding one of a plurality of target temperatures, the improvement wherein said temperature adjustor comprises correcting means for correcting at least either of said target temperatures and said detected temperatures of said processing means based on degree of interference at each of a plurality of measurement positions of said target object obtained by measuring temperatures of said target object at the plurality of measurement positions so as to reduce fluctuations of temperatures of said target object,
wherein said correcting means includes:
a memory storing data that indicate a relationship between changes in said target temperatures and changes in temperatures at the plurality of measurement positions of said target object; and
a calculating part that calculates a correction value for correcting at least either of said target temperatures and said detected temperatures by using said data stored in said memory,
wherein said calculating part calculates said correction value by using the inverse matrix of interference matrix that shows the relationship between changes in said target temperatures and changes in temperatures at the plurality of measurement positions of said target object.
6. The temperature adjustor of claim 5 wherein said correcting means includes a memory that stores a correction value for correcting at least either of said target temperatures and said detected temperatures.
7. The temperature adjustor of claim 5 wherein said calculating part calculates said correction value so as to reduce fluctuations of temperatures of the plurality of measurement positions of said target object.
8. In a temperature adjustor adapted to detect temperatures of a processing means for processing a target object at a plurality of detection positions and to control said temperatures of said processing means such that each of said detected temperatures will match corresponding one of a plurality of target temperatures, the improvement wherein said temperature adjustor comprises correcting means for correcting at least either of said target temperatures and said detected temperatures of said processing means based on degree of interference at each of a plurality of measurement positions of said target object obtained by measuring temperatures of said target object at the plurality of measurement positions so as to reduce fluctuations of temperatures of said target object, and wherein said degree of interference is as of when a specified length of time has elapsed since said processing means starts processing said target object.
9. The temperature adjustor of claim 8 wherein said correcting means corrects at least either of said target temperatures and said detected temperatures over the period from when said processing means starts processing said target object until said specified length of time has passed.
10. A control system comprising:
processing means for processing a target object;
heat-controlling means for heating or cooling said target object;
detecting means for detecting temperature of said processing means; and
a temperature adjustor adapted to detect temperatures of said processing means at a plurality of detection positions and to control said temperatures of said processing means such that each of said detected temperatures will match corresponding one of a plurality of target temperatures, said temperature adjustor comprising correcting means for correcting at least either of said target temperatures and said detected temperatures based on degree of interference at each of a plurality of measurement positions of said target object obtained by measuring temperatures at the plurality of measurement positions so as to reduce fluctuations of temperatures of said target object;
wherein said correcting means includes:
a memory storing data that indicate a relationship between changes in said target temperatures and changes in temperatures at the plurality of measurement positions of said target object; and
a calculating part that calculates a correction value for correcting at least either of said target temperatures and said detected temperatures by using said data stored in said memory, and
wherein said calculating part calculates said correction value by using the inverse matrix of interference matrix that shows the relationship between changes in said target temperatures and changes in temperatures at the plurality of measurement positions of said target object.
11. The control system of claim 10 wherein said correcting means includes a memory that stores a correction value for correcting at least either of said target temperatures and said detected temperatures.
12. The control system of claim 10 wherein said calculating part calculates said correction value so as to reduce fluctuations of temperatures of the plurality of measurement positions of said target object.
13. A control system comprising:
processing means for processing a target object;
heat-controlling means for heating or cooling said target object;
detecting means for detecting temperature of said processing means; and
a temperature adjustor adapted to detect temperatures of said processing means at a plurality of detection positions and to control said temperatures of said processing means such that each of said detected temperatures will match corresponding one of a plurality of target temperatures, said temperature adjustor comprising correcting means for correcting at least either of said target temperatures and said detected temperatures based on degree of interference at each of a plurality of measurement positions of said target object obtained by measuring temperatures at the plurality of measurement positions so as to reduce fluctuations of temperatures of said target object,
wherein said degree of interference is as of when a specified length of time has elapsed since said processing means starts processing said target object.
14. The control system of claim 13 wherein said correcting means corrects at least either of said target temperatures and said detected temperatures over the period from when said processing means starts processing said target object until said specified length of time has passed.