Semiconductor light-emitting device and method of manufacturing the same
A semiconductor light-emitting device capable of improving device characteristics such as life and reliability is provided. A current confinement layer includes a non-oxidized region made of AlAs or the like corresponding to a current injection region in an active layer, and an oxidized region made of aluminum oxide corresponding to a non-current injection region. The oxidized region is formed by forming a non-oxidized layer made of AlAs or the like and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C. The thickness of the oxidized region is preferably from 10 nm to 1000 nm. The width of the one side of the oxidized region is one time or more of the width of the non-oxidized region or seven times or less thereof The distance between current confinement layer and the active layer is preferably 50 nm or more, or 500 nm or less, and more preferably 180 nm or more.
1. A semiconductor light-emitting device comprising:
an active layer having a current injection region; and
a current confinement layer restricting the current injection region in the active layer and being provided on a side of the active layer, the current confinement layer including a non-oxidized region made of a semiconductor corresponding to the current injection region in the active layer; and an oxidized region having lower conductivity than the non-oxidized region corresponding to a region other than the current injection region in the active layer, the oxidized region being formed by forming a non-oxidized layer made of the semiconductor and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C.,
wherein,
the width of the oxidized region on one side of the non-oxidized region is greater than or equal to the width of the non-oxidized region,
the non-oxidized region and the current injection region are formed in strip shape and the oxidized region is formed in strip shape on both sides of the non-oxidized region, and
a distance between the current confinement layer and the active layer is 50 nm or more.
2. A semiconductor light-emitting device according to claim 1 , wherein light generated in the active layer is emitted to a direction perpendicular to a laminated direction of the active layer and the current confinement layer.
3. A semiconductor light-emitting device according to claim 1 , wherein a thickness of the oxidized region in the laminated direction of the active layer and the current confinement layer is from 10 nm to 1000 nm.
4. A semiconductor light-emitting device according to claim 1 , wherein a thickness of the oxidized region in the laminated direction of the active layer and the current confinement layer is from 30 nm to 60 nm.
5. A semiconductor light-emitting device according to claim 1 , wherein the width of the oxidized region on one side of the non-oxidized region is seven times or less of the width of the non-oxidized region.
6. A semiconductor light-emitting device according to claim 1 , wherein the active layer is made of a Group III-V compound semiconductor containing at least one kind from aluminum (Al), gallium (Ga) and indium (In) among Group 3B elements and at least one kind from nitrogen (N), phosphorus and arsenic (As) among Group 5B elements.
7. A semiconductor light-emitting device according to claim 1 , wherein the non-oxidized region is made of a Group III-V compound semiconductor containing at least aluminum (Al) among Group 3B elements and arsenic (As) among Group 5B elements, and the oxidized region is made of an insulating oxide containing aluminum (Al).
8. A semiconductor light-emitting device comprising:
an active layer having a current injection region; and
a current confinement layer restricting the current injection region in the active layer and being provided on a side of the active layer, the current confinement layer including a non-oxidized region made of a semiconductor corresponding to the current injection region in the active layer; and an oxidized region having lower conductivity than the non-oxidized region corresponding to a region other than the current injection region in the active layer, the oxidized region being formed by forming a non-oxidized layer made of the semiconductor and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C.,
wherein,
the width of the oxidized region on one side of the non-oxidized region is greater than or equal to the width of the non-oxidized region,
the non-oxidized region and the current injection region are formed in strip shape and the oxidized region is formed in strip shape on both sides of the non-oxidized region, and
a distance between the current confinement layer and the active layer is 180 nm or more.
9. A semiconductor light-emitting device comprising:
an active layer having a current injection region; and
a current confinement layer restricting the current injection region in the active layer and being provided on a side of the active layer, the current confinement layer including a non-oxidized region made of a semiconductor corresponding to the current injection region in the active layer; and an oxidized region having lower conductivity than the non-oxidized region corresponding to a region other than the current injection region in the active layer, the oxidized region being formed by forming a non-oxidized layer made of the semiconductor and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C.,
wherein,
the width of the oxidized region on one side of the non-oxidized region is greater than or equal to the width of the non-oxidized region,
the non-oxidized region and the current injection region are formed in strip shape and the oxidized region is formed in strip shape on both sides of the non-oxidized region, and
a distance between the current confinement layer and the active layer is 500 nm or less.
10. A semiconductor light-emitting device comprising:
an active layer having a current injection region; and
a current confinement layer restricting the current injection region in the active layer and being provided on a side of the active layer, the current confinement layer including a non-oxidized region made of a semiconductor corresponding to the current injection region in the active layer; and an oxidized region having lower conductivity than the non-oxidized region corresponding to a region other than the current injection region in the active layer, the oxidized region being formed by forming a non-oxidized layer made of the semiconductor and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C.,
wherein,
the width of the oxidized region on one side of the non-oxidized region is greater than or equal to the width of the non-oxidized region,
the non-oxidized region and the current injection region are formed in strip shape and the oxidized region is formed in strip shape on both sides of the non-oxidized region, and
a middle mesa, wherein the width of the middle mesa is at least 3 μm to at most 50 μm.
11. A semiconductor light-emitting device, comprising:
an active layer having a current injection region;
a current confinement layer restricting the current injection region in the active layer and being provided on a side of the active layer, the current confinement layer including a non-oxidized region made of a semiconductor corresponding to the current injection region in the active layer; and an oxidized region having lower conductivity than the non-oxidized region corresponding to a region other than the current injection region in the active layer, the oxidized region being formed by forming a non-oxidized layer made of the semiconductor and then oxidizing part of the non-oxidized layer at a temperature from 240° C. to less than 375° C.;
a cladding layer; and
a middle layer provided between the current confinement layer and the cladding layer for reducing a difference in lattice constant,
wherein,
the width of the oxidized region on one side of the non-oxidized region is greater than or equal to the width of the non-oxidized region, and
the non-oxidized region and the current injection region are formed in strip shape and the oxidized region is formed in strip shape on both sides of the non-oxidized region.