Integrated mask and method and apparatus for manufacturing organic EL device using the same
An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a plurality of openings on which the deposition masks are arranged is provided. The deposition mass are retained to the base plate by engaging unit in a disengageable manner, and alignment marks used for positioning the deposition masks on the base plate are formed on the base plate. In addition a method and apparatus for fabricating the integrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided.
1. An organic EL device manufacturing method comprising the steps of:
(a) positioning an integrated mask and a single substrate to be subjected to a deposition process in a deposition chamber using a camera to observe alignment marks formed on said integrated mask and said single substrate,
wherein said integrated mask comprises:
(a-1) a plurality of deposition masks each of which has an array of deposition apertures formed in accordance with a deposition pattern and alignment marks,
(a-2) a base plate which has a plurality of openings on which said deposition masks are arranged respectively, each of said deposition masks being arranged over respective openings, and which has alignment marks,
(a-3) a plurality of engaging units provided on said base plate each of which engages and disengages each of said deposition masks and said base plate by applying force to each of said deposition masks against the base plate such that the position of each deposition mask is adjusted relative to said base plate independently of the other deposition masks while each of said deposition masks is disengaged, and
wherein said integrated masks is fabricated by the steps of:
(a-4) detecting said alignment marks of said base plate and each of said deposition masks using a camera,
(a-5) adjusting the relative position between said base plate and each of said deposition masks prior to engaging the integrated mask with the substrate by independently retaining and independently moving each of said deposition masks relative to said base plate, and
(a-6) retaining each of said deposition masks on said base plate using said engaging units after adjusting of said relative position; and
(b) patterning a thin film layer in said deposition process using said integrated mask, thereby forming n said organic EL devices on said single substrate wherein n is an integer equal to or greater than 2.
2. An organic EL device manufacturing method according to claim 1 , wherein said thin film is an emitting layer or a metal electrode layer.