IP Library Granted Patent US 7,408,366
Granted Patent B2
US 7,408,366 · App. 11/352,535 · Granted Aug 5, 2008

Probe tips and method of making same

Assignee: Georgia Tech Research Corporation
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Quick Facts
Patent No.
US 7,408,366
App. No.
11/352,535
Granted
Aug 5, 2008
Kind
B2
Abstract

A probe includes a substrate and a tetragonal structure disposed on the substrate that has four end points. Three of the end points are disposed adjacent to the substrate. A fourth of the end points extends outwardly and substantially normal to the substrate. In a method of making a probe tip, a plurality of tetrapods are grown and at least one of the tetrapods is placed on a substrate at a selected location. The tetrapod is affixed to the substrate at the selected location.

Claims (20)

1. A probe, comprising:

a. a substrate;

b. a tetragonal structure disposed on the substrate, the tetragonal structure having four end points, three of the end points being disposed adjacent to the substrate, a fourth of the end points extending outwardly and substantially normal to the substrate; and

c. a ring-shaped ion beam-generated bond that bonds the three end points to the substrate wherein the bond comprises a material selected from a group consisting of: platinum, tungsten, quartz, and carbon.

2. The probe of claim 1 , wherein the tetragonal structure comprises a tetrapod.

3. The probe of claim 2 , wherein the tetrapod comprises a metal oxide.

4. The probe of claim 3 , wherein the metal oxide comprises zinc oxide.

5. The probe of claim 2 , wherein the tetrapod comprises cadmium telluride.

6. The probe of claim 1 , wherein the tetragonal structure comprises a tetrahedron.

7. The probe of claim 1 , wherein the substrate comprises a material selected from a group consisting of: a metal; a semiconductor, oxide, and a polymer.

8. The probe of claim 1 , wherein the substrate comprises a portion of a cantilever.

9. The probe of claim 1 , wherein the substrate comprises a portion of a membrane.

10. A probe sensor, comprising:

a. a disk-shaped membrane supported by a housing that defines a cavity that is covered by the membrane, the membrane having a center; and

b. a tetragonal structure disposed on the membrane adjacent to the center, the tetragonal structure having four end points, three of the end points being disposed adjacent to the membrane, a fourth of the end points extending outwardly and substantially normal to the membrane; and

c. a ring-shaped bond, disposed around the center of the membrane, that affixes the three end points to the membrane, wherein the ring-shaped bond comprises an ion beam-generated bond and wherein the bond comprises a material selected from a group consisting of: platinum, tungsten, quartz, and carbon.

11. The probe of claim 10 , wherein the substrate comprises a material selected from a group consisting of: a metal, a semiconductor, an oxide, and a polymer.

12. The probe of claim 10 , wherein the tetragonal structure comprises a tetrapod.

13. The probe of claim 12 , wherein the tetrapod comprises selected from a group consisting of: zinc oxide and cadmium telluride.

14. The probe of claim 10 , wherein the membrane comprises a material selected from a group consisting of: a metal; a semiconductor, oxide, and a polymer.

Assignments (2)
CONFIRMATORY LICENSE Recorded Dec 23, 2010
From: GEORGIA TECH RESEARCH CORPORATION
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 025561/0798 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2006
From: WANG, ZHONG L; HUGHES, WILLIAM L; BUCHINE, BRENT A
To: GEORGIA TECH RESEARCH CORPORATION
Reel/Frame 017384/0282 →
Continuity (1)
Related Publication 20070188182A1 · Aug 16, 2007