Method of evaluating optical element

1. An evaluation method for a reflective optical element on which a multilayer coating is formed, said method comprising the steps of:

measuring a secondary radiation emitted from the multilayer coating when light with a wavelength of 2 to 40 nm is introduced into the optical element;

calculating a phase difference between the light incident on the multilayer coating and light reflected from the multilayer coating, based on a result of said measuring the secondary radiation emitted from the multilayer; and

evaluating an equivalent surface shape of the multilayer coating based on a result of said calculating step.

2. The evaluation method according to claim 1 , further comprising the steps of:

measuring a surface shape of the optical element; and

determining a wavefront of the light reflected by the optical element based on values obtained in said measuring and calculating steps.

3. The evaluation method according to claim 1 , wherein said calculating step includes measuring an incident-angle dependency of the light incident upon the optical element with respect to the secondary radiation emitted from the multilayer coating.

4. The evaluation method according to claim 1 , wherein said calculating step determines a wavelength dependency of the light incident upon the optical element with respect to the secondary radiation emitted from the multilayer coating.

5. The evaluation method according to claim 1 , wherein said calculating step includes introducing the light into the multilayer coating at an angle different from an incident angle that satisfies Bragg's condition of the multilayer coating, and of measuring the secondary radiation emitted from the multilayer coating.

6. The evaluation method according to claim 1 , wherein said calculating step includes introducing the light into the multilayer coating with a wavelength different from a wavelength that satisfies Bragg's condition of the multilayer coating, and of measuring the secondary radiation emitted from the multilayer coating.

7. The evaluation method according to claim 1 , wherein said calculating step includes introducing the light into a reference sample, and of measuring a secondary radiation emitted from a surface of the reference sample made of the same material as a top layer of the multilayer coating.

8. The evaluation method according to claim 1 , wherein said calculating step includes fitting an actual measurement value by a model calculation with respect to a reflectance of the multilayer coating and a phase of the reflecting light.

9. The evaluation method according to claim 1 , wherein said calculating step includes accelerating and/or amplifying photoelectrons emitted from the multilayer coating, of irradiating the photoelectrons to a fluorescent material, and of measuring light emitted from the fluorescent material.

10. The evaluation method according to claim 1 , wherein a top layer of the multilayer coating is made of a material different from a layer other than the top layer.

11. An evaluation method for a reflective optical element on which a multilayer coating is formed, said method comprising the steps of:

applying a resist onto a surface of the multilayer coating;

introducing light with a wavelength of 2 to 40 nm into the multilayer coating to which the resist is applied, and exposing the resist;

measuring a residual coating distribution of the exposed resist;

calculating a phase difference between the light incident on the multilayer coating and light reflected from the multilayer coating, based on a result of said measuring the residual coating distribution of the exposed resist; and

evaluating an equivalent surface shape of the multilayer coating based on a result of said calculating step.

12. An evaluation apparatus of a reflective optical element on which a multilayer coating is formed, said evaluation apparatus comprising:

an illumination optical system for introducing light with a wavelength of 2 to 40 ran into the multilayer coating;

a detector for detecting a secondary radiation emitted from the multilayer coating; and

a calculator for calculating a phase difference between the light incident on the multilayer coating and light reflected from the multilayer coating, based on a detection result of said detector for detecting a secondary radiation emitted from the multilayer coating.

13. An evaluation method for a reflective optical element on which a multilayer coating is formed, said method comprising the steps of:

measuring a secondary radiation consisting of fluorescent X-ray or photoelectrons emitted from the multilayer coating when light with a wavelength of 2 to 40 nm is introduced into the optical element;

calculating a phase difference between the light incident on the multilayer coating and light reflected from the multilayer coating, based on a result of said measuring the secondary radiation consisting of fluorescent X-ray or photoelectrons emitted from the multilayer; and

evaluating an equivalent surface shape of the multilayer coating based on a result of said calculating step.