Adhesive system for supporting thin silicon wafer
In some embodiments, an adhesive system for supporting thin silicon wafer is presented. In this regard, a method is introduced to bond a silicon wafer to a translucent carrier through the use of an adhesive. Other embodiments are also disclosed and claimed.
1. A method comprising:
applying a first adhesive to a surface of a silicon wafer;
applying a second adhesive to a surface of a glass carrier, the second adhesive being able to absorb radiation with a wavelength of about 355 nm and the second adhesive being less strong than the first adhesive; and
bonding the first adhesive to the second adhesive.
2. The method of claim 1 , further comprising:
performing backside processing on the silicon wafer; and
applying radiation to the adhesive through the translucent carrier so as to weaken the adhesive and enable separation of the translucent carrier from the silicon wafer.
3. The method of claim 2 , wherein applying radiation comprises:
directing energy from a device chosen from the group consisting of a laser and a lamp.
4. The method of claim 2 , wherein performing backside processing on the silicon wafer comprises:
performing at least one procedure chosen from the group consisting of backgrinding, photolithography, wet etching, dry etching and electroplating.
5. The method of claim 2 , further comprising removing any remaining adhesive from the silicon wafer by a method chosen from the group consisting of thermal decomposition, peeling, plasma cleaning, pellet cleaning, and chemical stripping.