Semiconductor device with an air gap between lower interconnections and a connection portion to the lower interconnections not formed adjacent to the air gap
A method for fabricating a semiconductor device includes the steps of: forming a plurality of lower interconnections at intervals in a first insulating film; removing a portion of the first insulating film located between the lower interconnections, thereby forming an interconnection-to-interconnection gap; forming a second insulating film over the first insulating film in which the lower interconnections and the interconnection-to-interconnection gap are formed such that an air gap is formed out of the interconnection-to-interconnection gap; and forming, in the second insulating film, a connection portion connected to one of the lower interconnections and an upper interconnection connected to the connection portion. The connection portion is formed to be connected to one of the lower interconnections not adjacent to the air gap.
1. A semiconductor device, comprising:
a plurality of lower interconnections formed at intervals in a first insulating film;
a second insulating film formed over the lower interconnections and the first insulating film;
a connection portion formed in the second insulating film and connected to one of the lower interconnections; and
an upper interconnection formed in the second insulating film and connected to the connection portion,
wherein between the lower interconnections, an air gap is formed by covering, with the second insulating film, an interconnection-to-interconnection gap formed by removing a portion of the first insulating film between the lower interconnections,
the connection portion is connected to one of the lower interconnections not adjacent to the air gap, and
a part of the second insulating film coming into contact with the air gap and a part of the second insulating film formed on one of the lower interconnections not adjacent to the air gap are the identical film.
2. The semiconductor device of claim 1 , wherein
an interconnection-to-interconnection space X between the lower interconnections sandwiching the air gap satisfies the following relationship:
S≦X <3 S
where S is a minimum interconnection-to-interconnection space between the lower interconnections formed at a minimum resolution of lithography.
3. The semiconductor device of claim 1 , wherein
the air gap is located, from the connection portion, at least at a distance y satisfying the following relationship:
y=S+ ( L/ 2)
where S is a minimum interconnection-to-interconnection space between the lower interconnections formed at a minimum resolution of lithography and L is a minimum interconnection width of the lower interconnections formed at the minimum resolution of lithography.
4. The semiconductor device of claim 1 , wherein
a cap layer is formed between each of the surfaces of the lower interconnections and the second insulating film.
5. The semiconductor device of claim 4 , wherein
the cap layer has a width larger than the interconnection width of the lower interconnections and has an eave for an associated one of the lower interconnections.
6. The semiconductor device of claim 4 , wherein the cap layer is made of one or more materials selected from the group consisting of Ta, TaN, Ti, TiN, W, WCoP, CoB and NiMoP.
7. The method of claim 1 , wherein
the surfaces of the lower interconnections are lower than the surface of the first insulating film.
8. The semiconductor device of claim 1 , wherein each of the lower interconnections and the upper interconnection is made of a metal mainly containing Cu.
9. The semiconductor device of claim 1 , wherein each of the first and second insulating films is made of SiO 2 , FSG, SiOC or an organic polymer.
10. The semiconductor device of claim 1 , wherein the bottom of the interconnection-to-interconnection gap is located at a position deeper than the bottom of one of the lower interconnections adjacent to the interconnection-to-interconnection gap by about ⅓of the interconnection width of the lower interconnection.