Resonator, filter and fabrication of resonator
View Patent ↗A resonator includes a piezoelectric thin-film provided on a main surface of a substrate, a first electrode film provided on a first surface of the piezoelectric thin-film, a second electrode film provided on a second surface of the piezoelectric thin-film, a frequency adjustment film provided on one of the first and second electrode films, the frequency adjustment film comprising a film laminate including a first adjustment film provided on said one of the first and second electrode films, and a second adjustment film provided on the first adjustment film. The first adjustment film is used for Δf adjustment, and the second adjustment film is used for correcting frequency deviations generated in the filter manufacturing process. Thus, it is possible to accurately control the center frequency of the filter in which the multiple resonators are connected.
1. A filter having a series-arm resonator and a parallel-arm resonator, in which each of the resonators includes a common substrate, a common piezoelectric thin film having a first surface on which a first electrode film is formed and a second surface on which a second electrode film is formed, and a frequency adjustment film provided on the second electrode film, wherein:
the frequency adjustment films of the series-arm and parallel-arm resonators are partially provided on the second electrode film and are located in only overlapping regions in which the first and second electrodes overlap with each other across the piezoelectric thin film; and
the first electrodes of the series-arm and parallel-arm resonators facing cavities formed below the overlapping regions of the series-arm and parallel-arm resonators.
2. The filter as claimed in claim 1 , wherein:
the frequency adjustment film of the series-arm resonator has a single-layer structure; and
the frequency adjustment film of the parallel-arm resonator has a two-layer structure.
3. A method of fabricating a filter having a series-arm resonator and a parallel-arm resonator comprising:
forming a first electrode film on a first surface of the piezoelectric thin-film on a main surface of a substrate, a second electrode film on a second surface of the piezoelectric thin-film, and partially forming a first frequency adjustment film on one of the first and second electrode films;
adjusting a thickness of a portion of the first frequency adjustment film to adjust a first resonance frequency of the piezoelectric thin-film;
forming a second frequency adjustment film on the first frequency adjustment film; and
adjusting a thickness of a region of the second frequency adjustment film to adjust a second resonance frequency of the piezoelectric thin-film,
the first and second frequency adjustment films being provided in only overlapping regions in which the first and second electrodes overlap with each other across the piezoelectric thin film,
the first electrodes of the series-arm and parallel-arm resonators facing cavities formed below the overlapping regions of the series-arm and parallel-arm resonators.
4. The method as claimed in claim 3 , wherein: the series-arm resonator has only the first frequency adjustment film; and the parallel-arm resonator has the first and second frequency adjustment films.