System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure
View Patent ↗A nanoimprinting system incorporates a patterned media contact architecture to provide a uniform imprinting pressure across the target imprinting area on a disk substrate. The system leverages the unique disk substrate characteristic of an inner diameter hole by incorporating a membrane suspension, gel-pad buffering, and air cushion loading that exploits the inner diameter hole characteristics of the disk substrate. This design dramatically increases the uniformity of the pressing pressure across the target imprinting area. As a result, a simple and effective improvement of the quality of the patterns imprinted on the recording disk substrate is realized.
1. An imprinting apparatus, comprising:
a membrane stop ring having an opening;
a membrane mounted to the membrane stop ring such that the membrane extends and seals across the opening in the membrane stop ring;
a gel pad mounted to the membrane, the gel pad having a disk-like shape including an axial hole;
a stamper mounted to the gel pad and having a disk-like shape including an axial hole, and a contact surface with imprint features; and
a central block mounted to the membrane and extending through the axial holes of the get pad and the stamper.
2. An imprinting apparatus according to claim 1 , wherein the central block is cylindrical and extends in an axial direction concentric with the axial holes of the gel pad and the stamper.
3. An imprinting apparatus according to claim 1 , wherein the gel pad and the stamper are cylindrical in shape and free of contact with the central block.
4. An imprinting apparatus according to claim 1 , wherein the central block has an axial dimension that is greater than a combined axial dimension of the stamper and the gel pad, and the central block has a radial dimension that is less than radial dimensions of the axial holes of the gel pad and the stamper, respectively.
5. An imprinting apparatus according to claim 1 , wherein the gel pad has a radial dimension defined from its axial hole to an outer diameter of the gel pad that is approximately equal to or less than a radial dimension of the contact surface of the stamper.
6. An imprinting apparatus according to claim 1 , wherein the chuck is a vacuum chuck and the membrane is a Mylar membrane.
7. An imprinting apparatus according to claim 1 , further comprising a chuck, a disk substrate mounted to the chuck for imprinting by the stamper, directional and rotational stages for adjusting a position of the chuck, a load cell between the chuck and the directional and rotational stages, a quartz window for exposing the disk substrate to UV radiation, a sealed first chamber for pressurizing the stamper to imprint, and a sealed second chamber in which the disk substrate is located.
8. A nanoimprinting system for achieving uniform imprint pressure, comprising:
a disk substrate having an outer diameter, an axial hole that defines an inner diameter, and an imprint surface extending in a radial direction;
a chuck for supporting the disk substrate opposite the imprint surface;
a membrane stop ring having an opening;
a membrane mounted to the membrane stop ring such that the membrane extends and seals across the opening in the membrane stop ring;
a gel pad mounted to the membrane, the gel pad having an outer diameter and an axial hole that defines an inner diameter such that the gel pad is substantially congruent with the disk substrate;
a stamper mounted to the gel pad, the stamper having an outer diameter, an axial hole that defines an inner diameter such that the stamper is substantially congruent with the disk substrate, and a contact surface with imprint features for imprinting a resist layer on the imprint surface of the disk substrate; and
a central block mounted to the membrane and extending through the axial holes of the gel pad, the stamper, and the disk substrate into contact with the chuck.
9. A nanoimprinting system according to claim 8 , wherein the central block is cylindrical and extends in an axial direction concentric with the axial holes of the gel pad, the stamper, and the disk substrate.
10. A nanoimprinting system according to claim 8 , wherein the central block has an axial dimension that is greater than a combined axial dimension of the stamper and the gel pad, and the central block has a radial dimension that is less than radial dimensions of the inner diameters of the gel pad, the stamper, and the disk substrate, respectively, such that the central block is free of contact with the gel pad, the stamper, and the disk substrate.
11. A nanoimprinting system according to claim 8 , wherein the contact surface of the stamper has a radial dimension that is less than a radial dimension of the disk substrate between the inner and outer diameters of the disk substrate, such that a radial dimension of the imprint surface of the disk substrate is less than the radial dimension of the disk substrate between the inner and outer diameters of the disk substrate.
12. A nanoimprinting system according to claim 11 , wherein the gel pad has a radial dimension between its inner and outer diameters that is approximately equal to or less than the radial dimension of the contact surface of the stamper.
13. A nanoimprinting system according to claim 8 , wherein the chuck is a vacuum chuck and the membrane is a Mylar membrane.
14. A nanoimprinting system according to claim 8 , further comprising directional and rotational stages for adjusting a position of the chuck, a load cell between the chuck and the directional and rotational stages, a quartz window for exposing the disk substrate to UV radiation, a sealed first chamber for pressurizing the stamper to imprint, and a sealed second chamber in which the disk substrate is located.