Method for manufacturing piezoelectric actuator
In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding piezoelectric ceramic layers, included in the ceramic sintered body, located outermost in the thickness direction. In the ceramic sintered body, internal electrodes are each disposed between piezoelectric ceramic layers. The thickness direction is defined as the direction along the thickness of the piezoelectric ceramic layer. Each of the inert sections are disposed on at least one side of the active section, for driving the piezoelectric actuator, in the thickness direction. Dummy internal electrodes are arranged in the inert sections such that each of the dummy internal electrodes are each located between ceramic layers. The thickness of the piezoelectric ceramic layers disposed between the dummy internal electrodes increases with distance from the active section.
1. A method for manufacturing a piezoelectric actuator including a ceramic sintered body formed by co-firing internal electrodes and a piezoelectric ceramic, the method comprising the steps of:
preparing the ceramic sintered body including an active section and inert sections, the active section including piezoelectric ceramic layers and each of the internal electrodes disposed therebetween, the active section being arranged to enable the active section to be distorted during subsequent operation of the manufactured piezoelectric actuator, the direction along a thickness of the piezoelectric ceramic layer being defined as a thickness direction, the inert sections being each disposed on at least one side of the active section in the thickness direction, the inert sections including piezoelectric ceramic layers and dummy internal electrodes arranged in the thickness direction, the inert sections being arranged to enable the inert sections to not be distorted during subsequent operation of the manufactured piezoelectric actuator, each of the dummy internal electrodes being disposed between the piezoelectric ceramic layers in the inert sections, the thickness of the piezoelectric ceramic layers disposed between the dummy internal electrodes increasing as a distance from the active section increases, the thickness of the outermost piezoelectric ceramic layers located outside the respective outermost dummy internal electrodes in the thickness direction being greater than that of the piezoelectric ceramic layers disposed between the dummy internal electrodes; and
adjusting the size of the ceramic sintered body in the thickness direction by grinding the outermost piezoelectric ceramic layers located in the thickness direction.
2. The method for manufacturing a piezoelectric actuator according to claim 1 , wherein the distance between a surface of each of the inert sections that is located outermost in the thickness direction and the dummy internal electrode of the inert section that is located outermost in the thickness direction is adjusted to at least about 0.5% of the thickness of the piezoelectric actuator in the adjusting step.
3. The method for manufacturing a piezoelectric actuator according to claim 1 , wherein the active section and the inert sections are made of the same ceramic material.
4. The method for manufacturing a piezoelectric actuator according to claim 1 , further comprising a step of forming a first and a second external electrode for driving the active section on respective outer surfaces of the ceramic sintered body, the first and second external electrodes being electrically connected to some of the internal electrodes included in the active section.
5. The method for manufacturing a piezoelectric actuator according to claim 1 , wherein the piezoelectric ceramic layers include PZT ceramic.
6. The method for manufacturing a piezoelectric actuator according to claim 1 , wherein the internal electrodes are printed using an Ag/Pd paste.
7. The method for manufacturing a piezoelectric actuator according to claim 1 , wherein the ceramic sintered body is fired at about 1050° C.