Electro-optic display and connection between drain electrode and pixel electrode
A pixel electrode is disposed to cover the inner surfaces of a pixel-drain contact hole passing through a third insulating film and a second insulating film to reach a drain electrode. At the bottom of the pixel-drain contact hole, the pixel electrode is electrically connected with the drain electrode through a contact conductor film. The pixel-drain contact hole is formed of a connection of a contact hole passing through the second insulating film and a contact hole passing through the third insulating film. The dimensions of the opening end of the contact hole are larger than its dimensions at the bottom, and thus the inner surfaces of the contact hole are smoothly sloped and shaped like a crater in cross section.
1. An electro-optic display comprising an active-matrix substrate, said active-matrix substrate comprising an insulative substrate and a plurality of display pixels arranged in a matrix on said insulative substrate and each having a pixel electrode electrically connected with a thin film transistor,
wherein said active-matrix substrate further comprises, in each said display pixel,
an inorganic insulating film that is directly above substantially an entire upper surface of said insulative substrate, said inorganic insulating film being directly above a drain electrode of said thin film transistor;
an organic resin insulating film that is directly above substantially an entire upper surface of said inorganic insulating film;
a pixel-drain contact hole that passes through said inorganic insulating film and said organic resin insulating film to reach said drain electrode; and
a contact conductor film that is provided at a bottom of said pixel-drain contact hole and is in contact with said drain electrode but is not in contact with said organic resin insulating film,
said pixel electrode being disposed to cover an upper surface of said organic resin insulating film and also to cover an inner wall of said pixel-drain contact hole and said contact conductor film,
an edge portion of said contact conductor film being formed so as to be in contact with said inorganic insulating film exposed at the bottom of said pixel-drain contact hole.
2. The electro-optic display according to claim 1 , wherein said pixel-drain contact hole comprises a first contact hole passing through said inorganic insulating film and a second contact hole passing through said organic resin insulating film, said first contact hole and said second contact hole communicative connecting with each other to form said pixel-drain contact hole,
said second contact hole has an opening sized larger than an opening of said first contact hole,
the bottom of said pixel-drain contact hole corresponds to a bottom of said first contact hole, and
said contact conductor film fills said first contact hole and covers said inorganic insulating film exposed at the bottom of said second contact hole.
3. The electro-optic display according to claim 2 , wherein said second contact hole has its inner walls gently sloped to be shaped like a crater in cross section with its opening size increasing from the bottom toward its opening end.
4. The electro-optic display according to claim 1 , wherein said contact conductor film comprises a film of a metal selected from the group consisting of Cr (chromium), Mo (molybdenum), Ti (titanium), and W (tungsten).