Method of forming a low temperature-grown buffer layer, a light emitting element and method of making same, and light emitting device
View Patent ↗A method of forming a low temperature-grown buffer layer having the steps of: placing a Ga 2 O 3 substrate in a MOCVD apparatus; providing a H 2 atmosphere in the MOCVD apparatus and setting a buffer layer growth condition having an atmosphere temperature of 350° C. to 550° C.; and supplying a source gas having two or more of TMG, TMA and NH 3 onto the Ga 2 O 3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate.
1. A method of forming a low temperature-grown buffer layer, comprising:
placing a Ga 2 O 3 substrate in a metalorganic chemical vapor deposition apparatus;
providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus including the Ga 2 O 3 substrate and setting a buffer layer growth condition comprising an atmosphere temperature of 350° C. to 550° C.; and
supplying a source gas comprising two or more of trimethyl gallium, trimethylaluminum, and NH 3 onto the Ga 2 O 3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate.
2. The method according to claim 1 , wherein:
the low temperature-grown buffer layer comprises Al x Ga 1-x N (0≦x≦1).
3. A method of forming a low temperature-grown buffer layer, comprising:
acid-cleaning a Ga 2 O 3 substrate;
placing the acid-cleaned Ga 2 O 3 substrate in a metalorganic chemical vapor deposition apparatus;
providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus including the acid-cleaned Ga 2 O 3 substrate and setting a buffer layer growth condition comprising an atmosphere temperature of 350° C. to 550° C.; and
supplying a source gas comprising two or more of trimethyl gallium, trimethylaluminum, and NH 3 onto the Ga 2 O 3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate.
4. The method according to claim 3 , wherein:
the low temperature-grown buffer layer comprises Al x Ga 1-x N (0≦x≦1).
5. A method of forming a low temperature-grown buffer layer, comprising:
nitriding a Ga 2 O 3 substrate;
placing the nitrided Ga 2 O 3 substrate in a metalorganic chemical vapor deposition apparatus;
providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus including the nitrided Ga 2 O 3 substrate and setting a buffer layer growth condition comprising an atmosphere temperature of 350° C. to 550° C.; and
supplying a source gas comprising two or more of trimethyl gallium, trimethylaluminum, and NH3 onto the Ga 2 O 3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate.
6. The method according to claim 5 , wherein:
the nitriding is conducted in a temperature range of 750° C. to 850° C.
7. The method according to claim 5 , wherein:
the low temperature-grown buffer layer comprises Al x Ga 1-x N (0≦x≦1).
8. A method of forming a low temperature-grown buffer layer, comprising:
acid-cleaning a Ga 2 O 3 substrate;
nitriding the acid-cleaned Ga 2 O 3 substrate;
placing the nitrided Ga 2 O 3 substrate in a metalorganic chemical vapor deposition apparatus;
providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus including the nitrided Ga 2 O 3 substrate and setting a buffer layer growth condition comprising an atmosphere temperature of 350° C. to 550° C.; and
supplying a source gas comprising two or more of trimethyl gallium, trimethylaluminum, and NH 3 onto the Ga 2 O 3 substrate in during the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate.
9. The method according to claim 8 , wherein:
the nitriding is conducted in a temperature range of 750° C. to 850° C.
10. The method according to claim 8 , wherein:
the low temperature-grown buffer layer comprises Al x Ga 1-x N (0≦x≦1).
11. A method of making a light emitting element, comprising:
acid-cleaning a Ga 2 O 3 substrate;
nitriding the acid-cleaned Ga 2 O 3 substrate;
placing the nitrided Ga 2 O 3 substrate in a metalorganic chemical vapor deposition apparatus;
providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus including the nitrided Ga 2 O 3 substrate and setting a buffer layer growth condition comprising an atmosphere temperature of 350° C. to 550° C.;
supplying a source gas comprising two or more of trimethyl gallium, trimethylaluminum, and NH 3 onto the Ga 2 O 3 substrate in the buffer layer growth condition to form the low temperature-grown buffer layer on the Ga 2 O 3 substrate;
forming a first GaN layer on the low temperature-grown buffer layer while providing a N 2 atmosphere in the metalorganic chemical vapor deposition apparatus; and
forming a second GaN layer on the first GaN layer while providing a H 2 atmosphere in the metalorganic chemical vapor deposition apparatus.
12. The method according to claim 11 , wherein:
the nitriding is conducted in a temperature range of 750° C. to 850° C.
13. The method according to claim 11 , wherein:
the low temperature-grown buffer layer comprises Al x Ga 1-x N (0≦x≦1).
14. The method according to claim 11 , further comprising:
forming a current spreading layer on the second GaN layer;
forming a p-electrode on a portion of the current spreading layer; and
forming an-electrode on a portion of the first GaN layer, the portion of the first GaN layer being partially exposed by etching from the current spreading layer up to the first GaN layer.