Membrane structure and method of making
A membrane structure is provided. The membrane structure includes a polymer layer having a plurality of pores; and a ceramic layer disposed on the polymer layer. The ceramic layer has a plurality of substantially unconnected pores. Each of the substantially unconnected pores is in fluid communication with at least one of the pores of the polymer layer. A method of manufacturing a membrane structure is provided. The method includes the steps of providing a polymer layer having a plurality of pores; and disposing a ceramic layer on the polymer layer. Disposing a ceramic layer includes depositing a metal layer on the polymer layer; and anodizing the metal layer to convert the metal layer into a porous layer. At least one of the depositing step and the anodizing step is performed as a continuous process. Alternatively, at least one of the depositing and the anodizing step is performed as a batch process.
1. A method for manufacturing a membrane structure, the method comprising:
providing a polymer layer having a plurality of pores; and
disposing a porous ceramic layer on the polymer layer, wherein disposing the ceramic layer comprises
depositing a metal layer on the polymer layer,
depositing a protective layer on the metal layer, and
anodizing the metal layer through the polymer layer to convert the metal layer into the porous ceramic layer;
wherein the porous ceramic layer comprises a plurality of substantially unconnected pores, wherein each of the substantially unconnected pores is in fluid communication with at least one of the pores of the polymer layer.
2. The method of claim 1 , wherein at least one of the depositing and the anodizing steps is performed as a continuous process.
3. The method of claim 1 , wherein the depositing step is performed as a continuous process.
4. The method of claim 1 , wherein at least one of the depositing and the anodizing steps is performed as a batch process.
5. The method of claim 1 , wherein anodizing step is performed as a batch process.
6. The method of claim 1 , further comprising functionalizing at least one of the layers.
7. The method of claim 6 , wherein functionalizing the layer comprises exposing the layer to a species comprising a functional group.
8. The method of claim 6 , wherein the functionalizing species is provided as a vapor phase or a liquid phase.
9. The method of claim 6 , wherein functionalizing the layer is performed as a continuous process.
10. The method of claim 6 , wherein functionalizing the layer is performed as a batch process.
11. A method of manufacturing a membrane structure, the method comprising:
providing a polymer layer comprising a plurality of pores;
depositing a metal layer on the polymer;
depositing a protective layer on the metal layer; and
anodizing the metal layer though the polymer layer to convert the metal layer into a porous ceramic layer;
wherein at least one of the depositing step and the anodizing step is performed as a continuous process.