Semiconductor device
The reliability of a semiconductor device which has the semiconductor components which were mounted on the same surface of the same substrate via the bump electrodes with which height differs, and with which package structure differs is improved. Semiconductor component 2 of WPP structure is mounted on the main surface of the interposer substrate which forms a semiconductor device via a plurality of bump electrodes. Semiconductor component 3 of CSP structure is mounted on the main surface of an interposer substrate via a plurality of bump electrodes with larger diameter and contiguity pitch than the above-mentioned bump electrode. And under-filling 4 a and 4 b mutually different, are filled up between the facing surfaces of this interposer substrate and semiconductor components 2 , and between the facing surfaces of the interposer substrate and semiconductor components 3 , respectively.
1. A semiconductor device, comprising:
a substrate having an upper surface and a lower surface opposing the upper surface;
a first semiconductor component having a first main surface and a first back surface opposing the first main surface, and mounted over the upper surface of the substrate via a plurality of first bumps such that the first main surface of the first semiconductor component opposes to the upper surface of the substrate;
a second semiconductor component having a second main surface and a second back surface opposing the second main surface, and mounted over the upper surface of the substrate via a plurality of second bumps such that the second main surface of the second semiconductor component opposes to the upper surface of the substrate;
a first under-filling disposed between the first main surface of the first semiconductor component and the upper surface of the substrate;
a second under-filling disposed between the second main surface of the second semiconductor component and the upper surface of the substrate; and
a plurality of third bumps formed on the lower surface of the substrate;
wherein a height of each of the plurality of second bumps is greater than that of each of the plurality of first bumps; and
wherein a coefficient of thermal expansion of the second under-filling is greater than that of the first under-filling.
2. A semiconductor device according to claim 1 , wherein
materials of a portion which the under-filling contacts differ with the first semiconductor component and the second semiconductor component.
3. A semiconductor device according to claim 2 , wherein
a material of a portion to which the first under-filling contacts the first semiconductor component is polyimide system resin, and a material of a portion to which the second under-filling contacts the second semiconductor component is epoxy system resin.
4. A semiconductor device according to claim 1 , wherein
the first semiconductor component includes a first semiconductor chip, a wiring layer formed over a main surface of the first semiconductor chip, a rewiring layer formed over the wiring layer, and the first bumps electrically connected wit the rewiring layer; and
the second semiconductor component includes a second semiconductor chip, a wiring layer formed over a main surface of the second semiconductor chip, a wiring substrate over which the second semiconductor chip is mounted, and to which the wiring layer of the second semiconductor chip is electrically connected, and the second bumps electrically connected to a wiring of the wiring substrate.
5. A semiconductor device according to claim 4 , wherein
a logic circuit is formed in the first semiconductor chip, and a memory circuit is formed in the second semiconductor chip.
6. A semiconductor device according to claim 1 , wherein the first bumps, the second bumps, and the third bumps are formed with unleaded solder.
7. A semiconductor device according to claim 1 , wherein
the second under-filling is not in contact with the first under-filling.
8. A semiconductor device according to claim 7 , wherein
part of the second back surface of the second semiconductor component is exposed with respect to the second under-filling.