Chromatic compensation in Fizeau interferometer
The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminate the chromatic focus shift and non-common path errors produced by a light source of wavelength different from the design wavelength of the transmission sphere. By making the position of the collimating lens relative to the beam expander adjustable along the optical axis over some small range, illumination sources of various wavelength can be used in the same interferometer.
1. A Fizeau interferometer for testing spherical surfaces comprising:
a light source producing an illumination beam of predetermined wavelength directed along an optical path toward a test surface;
a collimator collimating said illumination beam;
a transmission sphere positioned along said optical path between the collimator and the test surface, said transmission sphere including a reference surface of the interferometer; and
actuating means for varying a distance between the light source and the collimator so as to affect a focal point position of a reference beam reflected from the reference surface.
2. The Fizeau interferometer of claim 1 , wherein said actuating means is operating by translating the collimator.
3. The Fizeau interferometer of claim 1 , further including a beam expander positioned along said optical path between the light source and the collimator, and wherein said actuating means is operating by varying a distance between the beam expander and the collimator.
4. The improvement of claim 3 , wherein said actuating means is operating by translating an eyepiece lens of the beam expander.
5. A method of correcting for chromatic focus shift in a Fizeau interferometer including a light source of predetermined wavelength directing an illumination beam along an optical axis toward a collimator and a test surface, wherein the interferometer further includes a transmission sphere positioned along said optical axis between the collimator and the test surface, the method comprising the steps of providing an actuating means for varying a distance between the light source and the collimator, and of compensating for a chromatic focus shift in the Fizeau interferometer by using said actuating means to shift a focal point position of a reference beam reflected by the reference surface.
6. The method of claim 5 , wherein said compensating step is carried out by translating the collimator.
7. The method of claim 5 , wherein the Fizeau interferometer further includes a beam expander positioned along said optical axis between the light source and the collimator, the actuating means is operating by varying a distance between the beam expander and the collimator, and the compensating step is carried out by varying a distance between the beam expander and the collimator.
8. The method of claim 7 , wherein said compensating step is carried out by translating an eyepiece lens of the beam expander.
9. A method for adjusting an optical power of an illumination beam to match a design specification of a transmission sphere of a Fizeau interferometer, said interferometer including a light source of predetermined wavelength directing an illumination beam along an optical axis toward a collimator and a test surface, said transmission sphere being positioned along said optical axis between the collimator and the test surface, the method comprising the steps of providing an actuating means for varying a distance between the light source and the collimator, and of adjusting the optical power of the illumination beam produced by the light source by using said actuating means to shift a focal point position of a reference beam reflected by the reference surface.
10. The method of claim 9 , wherein said adjusting step is carried out by translating the collimator.
11. The method of claim 9 , wherein the Fizeau interferometer further includes a beam expander positioned along said optical axis between the light source and the collimator, the actuating means is operating by varying a distance between the beam expander and the collimator, and the adjusting step is carried out by varying a distance between the beam expander and the collimator.
12. The method of claim 11 , wherein said adjusting step is carried out by translating an eyepiece lens of the beam expander.